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Sigma SQM-160 manual Appendix D. Declaration of Conformity, Manufacturer’s Name Sigma Instruments

Models: SQM-160

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Appendix

D.Declaration of Conformity

Manufacturer’s Name: Sigma Instruments

Manufacturer’s Address: 1318 Duff Drive

Fort Collins, CO 80524 USA

declares that the product:

Product Name: Rate/Thickness Monitor

Product Model: SQM-160

Product Options: All Options

conforms to the following Product Specifications:

Safety:	IEC
	CSA
	UL
EMC:	CISPR
	IEC
	IEC
	IEC

Supplementary Information: This product complies with the requirements of the Low Voltage Directive 73 / 23 / EEC and the EMC Directive 89 / 336 / EEC (inclusive 93 / 68 / EEC) and carries the “CE” mark accordingly.

Fort Collins, Colorado

April 2000

Gary L. Halcomb

President

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Sigma SQM-160 Appendix D. Declaration of Conformity, Manufacturer’s Name Sigma Instruments, declares that the product

Contents

Version SQM-160User’s Guide Rate/Thickness MonitorSafety Symbols Safety InformationReturn Policy Warranty InformationLimitation of Warranty Operation Table of ContentsChapter Quick StartA. Material Parameters B. Specifications C. I/O Connections MaintenanceAppendix Fuse ReplacementQuick Start 1.1 Installation1.0 Introduction Chapter1.2 Front Panel Front Panel ControlsChapter Quick StartQuick Start 1.3 Rear PanelRear Panel Connections ChapterQuick Start 1.4 System ConnectionsSystem Components ChapterQuick Start 1.5 Film SetupChapter Quick Start 1.6 Depositing a FilmChapter Operation 2.0 Introduction2.1 Menu Selection ChapterOperation 2.2 Film Parameters Setup1. Refer to the section on Sensor Selection for instructions on setting SENS AVG ChapterDisplay DENSITY TOOLING DefaultFilm Selection Film Parameters Menu Sub-MenuOperation 2.3 System Parameters Setup1. Refer to the section on Sensor Tooling for instructions on setting xTOOLING ChapterChapter System Parameters MenuDisplay TIMEBASE SIM MODE FRQ DISP RATE RES RATEFILT BAUDRATE ETCH DefaultDefault Display xTOOLING FMIN/MAX FREQ MIN FREQ MAXDisplay R/T BNDS RATE MIN RATE MAX THICKMIN THICKMAX DefaultOperation 2.4 Sensor SelectionSensor status can be seen by observing the Crystal Status LEDs If the LED is not illuminated, the crystal is disabled ChapterOperation 2.5 Sensor Min/Max FrequencyChapter Substrate Substrate 2.6 Sensor ToolingChapter OperationOperation 2.7 Rate/Thickness or Frequency Display2.8 Crystal Life Display ChapterChapter 2.9 Zero Thickness2.10 Shutter Operation 2.11 Simulate ModeOptions 3.1 Installation3.0 Introduction ChapterOptions 3.2 Four Sensor Card3.3 Analog Output Card ChapterChapter 4.1 Installation4.0 Introduction 4.2 Run MonCommChapter 4.3 Add and Delete FilmsTo add a new film to the Films List To delete a film from the Films ListTo download the films in the Download List 4.4 Download FilmsTo add or replace a film in the Download List To remove a film from the Download ListMonComm Software 4.5 Graph DataChapter MonComm Software To Adjust the Graph’s Scope4.6 Save Data ChapterMonComm Software 4.8 Load Defaults4.7 Edit System Parameters ChapterChapter 5.1 Fuse Replacement5.0 Introduction MaintenanceAppendix A. Material ParametersMeasurement Appendix B. SpecificationsGeneral Specifications AccessoriesType Relay I/O Connector Rear ViewPins Appendix C. I/O ConnectionsManufacturer’s Address 1318 Duff Drive SafetyAppendix D. Declaration of Conformity Manufacturer’s Name Sigma Instruments

Appendix

Manufacturer’s Name: Sigma Instruments

Manufacturer’s Address: 1318 Duff Drive

declares that the product:

Product Model: SQM-160

Safety: