Chapter 1

Quick Start

1.2Front Panel

 

Display1

Display2

 

 

Crystal Status LEDs

 

 

 

 

 

 

 

 

 

 

Control Knob

Rate A/s

 

Thickness kA

1

2

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

3

4

 

 

 

 

 

 

 

 

5

6

 

 

Z e r o

O p e n

 

 

 

Time SP

Crystal Status

 

 

 

 

Time

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

C l o s e d

 

 

 

Thk SP

 

 

 

 

 

 

 

 

 

 

 

 

 

Xtal Life

Shutter

 

 

 

 

Next

P r e v

Clear

Program

 

 

 

 

 

Final Thk

 

 

 

 

 

 

 

S i g m a

 

SQM-160

 

 

 

 

Control

Σ i n s t r u m e n t s

Rate/Thickness Monitor

 

Configuration

 

 

Control Section

 

 

Setpoint LEDs

 

Configuration Section

Front Panel Controls

Display 1

Displays rate and thickness in normal operation.

 

Displays setup parameter name in program mode.

Display 2

Displays deposition time in normal operation.

 

Displays setup parameter value in program mode.

Control

Zero thickness reading. Toggle Display 1 between Crystal Life

Section

and Rate/Thickness readings. Toggle shutter relay on/off.

Configuration

Program enters setup mode. Next/Prev moves thru menus.

Section

Clear cancels change and returns value to its original setting.

Setpoint LEDs

Illuminate when the indicated setpoint is reached.

Crystal Status

Illuminate when a crystal is active and operating.

LEDs

Flashes when an active crystal fails.

Control Knob

Used to adjust values or scroll though menu selections.

 

Pushing the control knob stores the current setting.

1-2

Page 7
Image 7
Sigma SQM-160 manual Chapter Quick Start, Front Panel Controls