Chapter 1

Quick Start

1.4System Connections

The diagram and table below identifies typical vacuum system components and their function.

S e n s o r

I n - V a c

 

C a b l e

S o u r c e

 

 

S h u t t e r

F e e d t h r o u g h

 

6 " B N C C a b l e

 

G r o u n d W i r e

O p t i o n A C a r d

 

O p t i o n B C a r d

G r o u n d

 

 

 

 

 

 

110

220

0

1

 

 

 

 

 

S e n s o r 1 S e n s o r 2

R S - 2 3 2

R e l a y I / O

L i n e F u s e

 

 

 

 

 

 

Fuse 1/2 A SB at 120VAC

 

 

Manufactured By

Model No. SQM-160

Fuse 1/4 A SB at 240VAC

 

 

S i g m a

Ser No. 80901

 

 

 

 

Σ instruments

 

 

 

 

 

 

O s c i l l a t o r

1 0 ' B N C C a b l e

 

System Components

Sensor

Holds the quartz crystal used to measure rate and thickness.

 

Crystals must be replaced occasionally.

In-Vac Cable

A coax cable, typically 30” long, that connects the sensor to the

 

feedthrough.

Feedthrough

Provides isolation between vacuum and atmosphere for

 

electrical and cooling lines.

6” BNC Cable

Provides a flexible connection from the feedthrough to the

 

oscillator. Keep this cable as short as possible.

Oscillator

Contains the electronics to operate the quartz crystal. Total

 

cable length to the crystal should be under 40”.

10’ BNC Cable

Connects the oscillator to the SQM-160. Lengths up to 100’

 

are acceptable.

Ground Wire

A wire, typically braided, that connects the vacuum system to

 

the SQM160 ground terminal.

1-4

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Image 9
Sigma SQM-160 manual Chapter Quick Start System Connections, System Components