Sigma SQM-160 manual Introduction, Installation, Chapter, Quick Start

Chapter 1 Quick Start

1.0Introduction

Congratulations on your purchase of the SQM-160 Deposition Rate/Thickness Monitor. The SQM-160 is an easy-to-use instrument for measuring many types of thin film coatings. This chapter will help to get you up and running quickly. Please review the entire manual for detailed operational, programming, and safety information.

1.1Installation

Refer to Sections 1.3 and 1.4 for detailed system hookup information.

Rack	The SQM-160 occupies a 3.5” high, half-rack space. An
Installation	optional kit (900-008) is available to adapt to a full rack. Install
	the unit in a 19” rack with the supplied hardware.
Power	WARNING: The SQM-160 is shipped with a ½ A Fuse for use
Connection	with 90–120 VAC. If your line voltage is 180–240 VAC, replace
	the fuse with the ¼A fuse included with your SQM-160.
	WARNING: Verify that the Voltage Selector Switch located next
	to the power switch matches your line voltage.
	Plug the SQM-160 into your power source with the included
	power cord.
Sensor	Connect the BNC cables and oscillator from your vacuum
Connections	chamber feedthrough to the desired SQM-160 Sensor Input(s).
Digital I/O	Refer to Appendix C for details on wiring digital I/O to the
Connections	SQM-160 Relay I/O connector.
Computer	If you would like to use the supplied Windows software to
Connection	collect data or program the SQM-160, attach a 9 pin straight-
	thru cable from the SQM-160 RS-232 connector to your
	computer’s serial port.
Option	If you purchased the Analog Output Option (502-021), connect
Connections	a BNC cable form the Rate or Thickness connector to your
	chart recorder.

Move the rear panel power switch to the On () position. The SQM-160 will briefly display its software version, then go to normal operating mode.

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