Contents
Version
SQM-160
User’s Guide
Rate/Thickness Monitor
Safety Symbols
Safety Information
Return Policy
Warranty Information
Limitation of Warranty
Operation
Table of Contents
Chapter
Quick Start
A. Material Parameters B. Specifications C. I/O Connections
Maintenance
Appendix
Fuse Replacement
Quick Start
1.1 Installation
1.0 Introduction
Chapter
1.2 Front Panel
Front Panel Controls
Chapter
Quick Start
Quick Start
1.3 Rear Panel
Rear Panel Connections
Chapter
Quick Start
1.4 System Connections
System Components
Chapter
Quick Start
1.5 Film Setup
Chapter
Quick Start
1.6 Depositing a Film
Chapter
Operation
2.0 Introduction
2.1 Menu Selection
Chapter
Operation
2.2 Film Parameters Setup
1. Refer to the section on Sensor Selection for instructions on setting SENS AVG
Chapter
Display DENSITY TOOLING
Default
Film Selection Film Parameters Menu
Sub-Menu
Operation
2.3 System Parameters Setup
1. Refer to the section on Sensor Tooling for instructions on setting xTOOLING
Chapter
Chapter
System Parameters Menu
Display TIMEBASE SIM MODE FRQ DISP RATE RES RATEFILT BAUDRATE ETCH
Default
Default
Display xTOOLING FMIN/MAX FREQ MIN FREQ MAX
Display R/T BNDS RATE MIN RATE MAX THICKMIN THICKMAX
Default
Operation
2.4 Sensor Selection
Sensor status can be seen by observing the Crystal Status LEDs If the LED is not illuminated, the crystal is disabled
Chapter
Operation
2.5 Sensor Min/Max Frequency
Chapter
Substrate Substrate
2.6 Sensor Tooling
Chapter
Operation
Operation
2.7 Rate/Thickness or Frequency Display
2.8 Crystal Life Display
Chapter
Chapter
2.9 Zero Thickness
2.10 Shutter Operation
2.11 Simulate Mode
Options
3.1 Installation
3.0 Introduction
Chapter
Options
3.2 Four Sensor Card
3.3 Analog Output Card
Chapter
Chapter
4.1 Installation
4.0 Introduction
4.2 Run MonComm
Chapter
4.3 Add and Delete Films
To add a new film to the Films List
To delete a film from the Films List
To download the films in the Download List
4.4 Download Films
To add or replace a film in the Download List
To remove a film from the Download List
MonComm Software
4.5 Graph Data
Chapter
MonComm Software
To Adjust the Graph’s Scope
4.6 Save Data
Chapter
MonComm Software
4.8 Load Defaults
4.7 Edit System Parameters
Chapter
Chapter
5.1 Fuse Replacement
5.0 Introduction
Maintenance
Appendix
A. Material Parameters
Measurement
Appendix B. Specifications
General Specifications
Accessories
Type
Relay I/O Connector Rear View
Pins
Appendix C. I/O Connections
Manufacturer’s Address 1318 Duff Drive
Safety
Appendix D. Declaration of Conformity
Manufacturer’s Name Sigma Instruments