Chapter 1 | Quick Start |
1.6Depositing a Film
If you have followed this Quick Start chapter, you are ready to deposit a film. Follow the procedure below to begin deposition.
Verify Sensor Operation
Display Rate/Thickness
Verify that the Crystal Status LED for the measuring sensor is lit, and not flashing.
Display 1 should be displaying Rate on the left and Thickness on the right. If the Crystal Life display mode is active, press the Xtal Life switch to return to Rate/Thickness mode. If the Program Mode is active, press Program to return to normal mode.
Zero | If needed, press the Zero switch to zero the thickness reading. |
Thickness |
|
Start | Apply power to your source evaporation supply. If the SQM- |
Deposition | 160 shutter relay is connected, press the Shutter switch to |
| begin deposition. |
The Rate and Thickness displays should begin to move from zero. Please take time to review the remainder of this manual for detailed operational, programming, and safety information.
If the displays remain at zero, check your system setup to assure that you are actually evaporating. Also check that the deposited material is reaching the sensor.
If the display is erratic or noisy, first check your sensor connections. Refer to the Timebase, Rate Filter and Rate Resolution sections of Chapter 2 for information that can help in troubleshooting noisy reading problems.
If the rate and thickness readings do not match your expectations, refer to the Film Parameter (Density,
