Contents
Rate/Thickness Monitor
SQM-160
User’s Guide
Version
Safety Information
Safety Symbols
Return Policy
Warranty Information
Limitation of Warranty
Quick Start
Table of Contents
Chapter
Operation
Fuse Replacement
Maintenance
Appendix
A. Material Parameters B. Specifications C. I/O Connections
Chapter
1.1 Installation
1.0 Introduction
Quick Start
Quick Start
Front Panel Controls
Chapter
1.2 Front Panel
Chapter
1.3 Rear Panel
Rear Panel Connections
Quick Start
Chapter
1.4 System Connections
System Components
Quick Start
Quick Start
1.5 Film Setup
Chapter
Quick Start
1.6 Depositing a Film
Chapter
Chapter
2.0 Introduction
2.1 Menu Selection
Operation
Chapter
2.2 Film Parameters Setup
1. Refer to the section on Sensor Selection for instructions on setting SENS AVG
Operation
Sub-Menu
Default
Film Selection Film Parameters Menu
Display DENSITY TOOLING
Chapter
2.3 System Parameters Setup
1. Refer to the section on Sensor Tooling for instructions on setting xTOOLING
Operation
Default
System Parameters Menu
Display TIMEBASE SIM MODE FRQ DISP RATE RES RATEFILT BAUDRATE ETCH
Chapter
Default
Display xTOOLING FMIN/MAX FREQ MIN FREQ MAX
Display R/T BNDS RATE MIN RATE MAX THICKMIN THICKMAX
Default
Chapter
2.4 Sensor Selection
Sensor status can be seen by observing the Crystal Status LEDs If the LED is not illuminated, the crystal is disabled
Operation
Operation
2.5 Sensor Min/Max Frequency
Chapter
Operation
2.6 Sensor Tooling
Chapter
Substrate Substrate
Chapter
2.7 Rate/Thickness or Frequency Display
2.8 Crystal Life Display
Operation
2.11 Simulate Mode
2.9 Zero Thickness
2.10 Shutter Operation
Chapter
Chapter
3.1 Installation
3.0 Introduction
Options
Chapter
3.2 Four Sensor Card
3.3 Analog Output Card
Options
4.2 Run MonComm
4.1 Installation
4.0 Introduction
Chapter
To delete a film from the Films List
4.3 Add and Delete Films
To add a new film to the Films List
Chapter
To remove a film from the Download List
4.4 Download Films
To add or replace a film in the Download List
To download the films in the Download List
MonComm Software
4.5 Graph Data
Chapter
Chapter
To Adjust the Graph’s Scope
4.6 Save Data
MonComm Software
Chapter
4.8 Load Defaults
4.7 Edit System Parameters
MonComm Software
Maintenance
5.1 Fuse Replacement
5.0 Introduction
Chapter
A. Material Parameters
Appendix
Accessories
Appendix B. Specifications
General Specifications
Measurement
Appendix C. I/O Connections
Relay I/O Connector Rear View
Pins
Type
Manufacturer’s Name Sigma Instruments
Safety
Appendix D. Declaration of Conformity
Manufacturer’s Address 1318 Duff Drive