Table of Contents

 

Chapter 1

Quick Start

 

1.0

Introduction

..................................................................................................................

1-1

1.1

Installation

1-4

1.2

Front Panel

1-1

1.3

Rear Panel

1-2

1.4

System Connections

1-3

1.5

Film Setup

1-5

1.6

Depositing a Film

1-6

Chapter 2

Operation

 

2.0

Introduction

2-1

2.1

Menu Selection

............................................................................................................

2-1

2.2

Film Parameters Setup

2-2

2.3

System Parameters Setup

2-4

2.4

Sensor Selection

2-7

2.5

Sensor Min/Max Frequency

2-8

2.6

Sensor Tooling

2-9

2.7

Rate/Thickness or Frequency Display

2-10

2.8

Crystal Life Display

2-10

2.9

Zero Thickness

2-11

2.10Shutter Operation

2.11Simulate Mode .................................................................................................................................................................................................................

Chapter 3

Options

3.0Introduction...................................................................................................................

3.1Option Card Installation ..............................................................................................

3.2Four Sensor Card ........................................................................................................

3.3Analog Output Card.....................................................................................................

Chapter 4

MonComm Software

 

4.0

Introduction

4-1

4.1

Installation

4-1

4.2

Run MonComm

............................................................................................................

4-1

4.3

Add and Delete Films

4-2

4.4

Download Films

............................................................................................................

4-3

4.5

Graph Data

4-4

4.6

Save Data

4-5

4.7

Edit System Parameters

4-6

4.8

Load Defaults

4-6

 

 

 

 

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Sigma SQM-160 manual Table of Contents Chapter Quick Start, Chapter Operation, Chapter Options, Chapter MonComm Software
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