Sigma SQM-160 manual Appendix B. Specifications, Measurement, Film Parameters, System Parameters

Appendix

B. Specifications

Measurement
Number of Sensors	2 standard, plus 4 optional
Frequency Range	4.0MHz to 6.0Mhz
Frequency Accuracy	.01% @ 2 rdgs/sec.
Frequency Resolution	.1 Hz
Rate Accuracy	.5% typical
Rate Resolution	.01/.1 Å/s
Thickness Accuracy	.5% typical
Thickness Resolution	1 Å
Measurement Filter	1 to 20 readings
Measurement Period	.15 to 2 sec
Film Parameters
Stored Films	9
Density	0.5 – 99.99 gm/cc
Tooling	10 – 399 %
Z-Factor	0.10 – 10.00
Final Thickness	0.000 – 99.99 kÅ
Thickness Setpoint	0.000 – 99.99 kÅ
Time Setpoint	0:00 – 99:59 sec
System Parameters
Simulate Mode	On/Off
Frequency Mode	On/Off
Etch Mode	On/Off
Crystal Fail Minimum.	4.0 to 6.0 MHz
Crystal Fail Maximum	4.1 to 6.1 MHz
RS-232 Baud Rate	2.4/4.8/9.6/19.2 kb/s
General Specifications
Power Supply	90-140VAC, 180-240VAC, 50-60HZ
Power Consumption	20VA
Operating Environment	0°C to 50°C
	0 to 80% RH non-condensing
Storage Environment	-40°C to 70°C
Operating Altitude	0 to 2,000 meters
Rack Dimensions (HxWxD)	88.5mm x 212.7mm x 196.9mm
Weight	13.2 kg (6 lbs)
Accessories	Power Cord, Rack Mount Ears,
	Relay I/O Connector, RS-232 Cable,
	MonComm Software, Manual