Chapter 2 | Operation |
Display xTOOLING
FMIN/MAX
FREQ MIN
FREQ MAX
Description | Range | Default | Units |
Tooling value assigned to each | 10 – 399 | 100 | % |
sensor. See the Sensor Tooling |
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section of this chapter for |
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information on setting tooling |
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values. |
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Frequency Limits |
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Minimum Crystal Frequency | 4.00 – 6.00 | 5.00 | MHz |
Maximum Crystal Frequency | 4.10 – 6.10 | 6.10 | MHz |
The following System Parameters apply only if the optional Analog Output card is installed. See the Options chapter for more information on setting the Analog Output Card parameters.
Display
R/T BNDS
RATE MIN
RATE MAX
THICKMIN
THICKMAX
Description | Range | Default | Units | |
Rate and Thickness Bounds Sub- |
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Menu |
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Deposition Rate for Zero Output | 0 | – 999 | 0 | Å/s |
(Zero Volts) |
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Deposition Rate for Full Scale | 9.9 – 999 | 100 | Å/s | |
Output (+5 Volts) |
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Thickness for Zero Output (Zero | 0 | – 99.99 | 0.00 | kÅ |
Volts) |
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Thickness for Full Scale Output | 0 | – 99.99 | 1.00 | kÅ |
(+5 Volts) |
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