Sigma
SQM-160
manual
Specs
Install
Load Defaults
Safety Symbols
Warranty
Maintenance
Chapter Quick Start Film Setup
Relay I/O Connector Rear View
To Adjust the Graph’s Scope
Fuse Replacement
Page 1
SQM-160
Rate/Thickness Monitor
User’s Guide
Version 2.0
© Copyright Sigma Instruments, Inc. 2000
Σ
Sigma
instruments
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Contents
SQM-160
Safety Symbols
Safety Information
Limitation of Warranty
Warranty Information
Return Policy
Chapter Operation
Table of Contents Chapter Quick Start
Chapter Options
Chapter MonComm Software
Appendix
Chapter Maintenance
Chapter Quick Start Introduction
Installation
Front Panel Controls
Chapter Quick Start
Rear Panel Connections
Chapter Quick Start Rear Panel
System Components
Chapter Quick Start System Connections
Chapter Quick Start Film Setup
Chapter Quick Start Depositing a Film
Menu Selection
Chapter Operation Introduction
Chapter Operation Film Parameters Setup
Film Selection Film Parameters Menu Sub-Menu
Description Range Default Units
Display
Chapter Operation System Parameters Setup
System Parameters Menu Sub-Menu
Timebase SIM Mode FRQ Disp Rate RES Ratefilt Baudrate Etch
FMIN/MAX Freq MIN Freq MAX
Display xTOOLING
Chapter Operation Sensor Selection
Chapter Operation Sensor Min/Max Frequency
Chapter Operation Sensor Tooling
Crystal Life Display
Chapter Operation Rate/Thickness or Frequency Display
Chapter Operation Zero Thickness
Simulate Mode
Shutter Operation
Chapter Options Introduction
Analog Output Card
Chapter Options Four Sensor Card
Run MonComm
Chapter MonComm Software Introduction
To add a new film to the Films List
Chapter MonComm Software Add and Delete Films
To delete a film from the Films List
To add or replace a film in the Download List
Chapter MonComm Software Download Films
To remove a film from the Download List
To download the films in the Download List
Chapter MonComm Software Graph Data
Save Data
To Adjust the Graph’s Scope
Chapter MonComm Software Edit System Parameters
Load Defaults
Fuse Replacement
Chapter Maintenance Introduction
Appendix Material Parameters
Appendix Specifications
Pins Type Description
Relay I/O Connector Rear View
Appendix O Connections
Appendix Declaration of Conformity
Safety
Declares that the product
Product Model SQM-160 Product Options All Options
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