Sigma SQM-160 manual Chapter Quick Start Depositing a Film

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Chapter 1

Quick Start

1.6Depositing a Film

If you have followed this Quick Start chapter, you are ready to deposit a film. Follow the procedure below to begin deposition.

Verify Sensor Operation

Display Rate/Thickness

Verify that the Crystal Status LED for the measuring sensor is lit, and not flashing.

Display 1 should be displaying Rate on the left and Thickness on the right. If the Crystal Life display mode is active, press the Xtal Life switch to return to Rate/Thickness mode. If the Program Mode is active, press Program to return to normal mode.

Zero

If needed, press the Zero switch to zero the thickness reading.

Thickness

 

Start

Apply power to your source evaporation supply. If the SQM-

Deposition

160 shutter relay is connected, press the Shutter switch to

 

begin deposition.

The Rate and Thickness displays should begin to move from zero. Please take time to review the remainder of this manual for detailed operational, programming, and safety information.

If the displays remain at zero, check your system setup to assure that you are actually evaporating. Also check that the deposited material is reaching the sensor.

If the display is erratic or noisy, first check your sensor connections. Refer to the Timebase, Rate Filter and Rate Resolution sections of Chapter 2 for information that can help in troubleshooting noisy reading problems.

If the rate and thickness readings do not match your expectations, refer to the Film Parameter (Density, Z-Factor, Tooling) and Sensor Tooling sections of Chapter 2.

1-6

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Contents SQM-160 Safety Symbols Safety InformationReturn Policy Warranty InformationLimitation of Warranty Chapter MonComm Software Table of Contents Chapter Quick StartChapter Operation Chapter OptionsAppendix Chapter MaintenanceChapter Quick Start Introduction InstallationFront Panel Controls Chapter Quick StartRear Panel Connections Chapter Quick Start Rear PanelSystem Components Chapter Quick Start System ConnectionsChapter Quick Start Film Setup Chapter Quick Start Depositing a Film Menu Selection Chapter Operation IntroductionChapter Operation Film Parameters Setup Display Description Range Default UnitsFilm Selection Film Parameters Menu Sub-Menu Chapter Operation System Parameters Setup System Parameters Menu Sub-Menu Timebase SIM Mode FRQ Disp Rate RES Ratefilt Baudrate EtchFMIN/MAX Freq MIN Freq MAX Display xTOOLINGChapter Operation Sensor Selection Chapter Operation Sensor Min/Max Frequency Chapter Operation Sensor Tooling Crystal Life Display Chapter Operation Rate/Thickness or Frequency DisplayShutter Operation Simulate ModeChapter Operation Zero Thickness Chapter Options Introduction Analog Output Card Chapter Options Four Sensor CardRun MonComm Chapter MonComm Software IntroductionTo delete a film from the Films List Chapter MonComm Software Add and Delete FilmsTo add a new film to the Films List To download the films in the Download List Chapter MonComm Software Download FilmsTo add or replace a film in the Download List To remove a film from the Download ListChapter MonComm Software Graph Data Save Data To Adjust the Graph’s ScopeChapter MonComm Software Edit System Parameters Load DefaultsFuse Replacement Chapter Maintenance IntroductionAppendix Material Parameters Appendix Specifications Appendix O Connections Relay I/O Connector Rear ViewPins Type Description Product Model SQM-160 Product Options All Options SafetyAppendix Declaration of Conformity Declares that the product