Sigma SQM-160 manual Chapter Quick Start System Connections, System Components

Page 9

Chapter 1

Quick Start

1.4System Connections

The diagram and table below identifies typical vacuum system components and their function.

S e n s o r

I n - V a c

 

C a b l e

S o u r c e

 

 

S h u t t e r

F e e d t h r o u g h

 

6 " B N C C a b l e

 

G r o u n d W i r e

O p t i o n A C a r d

 

O p t i o n B C a r d

G r o u n d

 

 

 

 

 

 

110

220

0

1

 

 

 

 

 

S e n s o r 1 S e n s o r 2

R S - 2 3 2

R e l a y I / O

L i n e F u s e

 

 

 

 

 

 

Fuse 1/2 A SB at 120VAC

 

 

Manufactured By

Model No. SQM-160

Fuse 1/4 A SB at 240VAC

 

 

S i g m a

Ser No. 80901

 

 

 

 

Σ instruments

 

 

 

 

 

 

O s c i l l a t o r

1 0 ' B N C C a b l e

 

System Components

Sensor

Holds the quartz crystal used to measure rate and thickness.

 

Crystals must be replaced occasionally.

In-Vac Cable

A coax cable, typically 30” long, that connects the sensor to the

 

feedthrough.

Feedthrough

Provides isolation between vacuum and atmosphere for

 

electrical and cooling lines.

6” BNC Cable

Provides a flexible connection from the feedthrough to the

 

oscillator. Keep this cable as short as possible.

Oscillator

Contains the electronics to operate the quartz crystal. Total

 

cable length to the crystal should be under 40”.

10’ BNC Cable

Connects the oscillator to the SQM-160. Lengths up to 100’

 

are acceptable.

Ground Wire

A wire, typically braided, that connects the vacuum system to

 

the SQM160 ground terminal.

1-4

Image 9
Contents SQM-160 Safety Symbols Safety InformationWarranty Information Limitation of WarrantyReturn Policy Chapter Operation Table of Contents Chapter Quick StartChapter Options Chapter MonComm SoftwareAppendix Chapter MaintenanceChapter Quick Start Introduction InstallationFront Panel Controls Chapter Quick StartRear Panel Connections Chapter Quick Start Rear PanelSystem Components Chapter Quick Start System ConnectionsChapter Quick Start Film Setup Chapter Quick Start Depositing a Film Menu Selection Chapter Operation IntroductionChapter Operation Film Parameters Setup Description Range Default Units Film Selection Film Parameters Menu Sub-MenuDisplay Chapter Operation System Parameters Setup System Parameters Menu Sub-Menu Timebase SIM Mode FRQ Disp Rate RES Ratefilt Baudrate EtchFMIN/MAX Freq MIN Freq MAX Display xTOOLINGChapter Operation Sensor Selection Chapter Operation Sensor Min/Max Frequency Chapter Operation Sensor Tooling Crystal Life Display Chapter Operation Rate/Thickness or Frequency DisplaySimulate Mode Chapter Operation Zero ThicknessShutter Operation Chapter Options Introduction Analog Output Card Chapter Options Four Sensor CardRun MonComm Chapter MonComm Software IntroductionChapter MonComm Software Add and Delete Films To add a new film to the Films ListTo delete a film from the Films List To add or replace a film in the Download List Chapter MonComm Software Download FilmsTo remove a film from the Download List To download the films in the Download ListChapter MonComm Software Graph Data Save Data To Adjust the Graph’s ScopeChapter MonComm Software Edit System Parameters Load DefaultsFuse Replacement Chapter Maintenance IntroductionAppendix Material Parameters Appendix Specifications Relay I/O Connector Rear View Pins Type DescriptionAppendix O Connections Appendix Declaration of Conformity SafetyDeclares that the product Product Model SQM-160 Product Options All Options