Sigma SQM-160 manual Chapter Quick Start Film Setup

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Chapter 1

Quick Start

1.5Film Setup

This section will help you setup the SQM-160 to measure a film. Refer to Chapter 2 for detailed film programming instructions.

Note: User actions with front panel controls are indicated by a Box. Results shown on displays, are indicated by a Dashed Box.

Enter Program Mode

If the Crystal Life display is shown, press Xtal Life to return to Rate/Thickness mode. Press Program to enter the film setup menu. Pressing the program switch while in program mode returns the SQM-160 to normal mode.

Select a Film

Set Film Parameters

Set System Parameters

Turn the Control Knob to select one of the nine possible films, then press the Control Knob to enter the film parameters menu.

Turn the Control Knob to set the first film parameter (density). The parameter value is shown in Display 2 . Press the Control Knob to save the value and move to the next film parameter. If you press Clear , the film parameter returns to its original value. Continue to set each parameter. When the last film parameter is entered, the SQM-160 returns to normal mode. See Chapter 2 for detailed instructions on setting Film Parameters.

To Enter the system menu, press Program, then Prev. Set system parameters by turning, then pushing, the Control Knob as described above. See Chapter 2 for detailed instructions on setting System Parameters.

If the sensor(s) you selected during film setup are connected to the SQM-160, the Crystal Status LEDs should be lit. If not, return to the Film Parameters menu and set the Sensor Average parameter to the desired sensor(s).

If the Crystal Status LED is flashing, it is most likely that sensor is not properly connected. Sigma supplies a small test crystal with each oscillator module that can be used to test sensor connections external to the vacuum chamber. Referring to Section 1.4, disconnect the oscillator from its 6” BNC cable. Attach the test crystal to the oscillator’s feedthrough connector. The Crystal Status LED will remain lit if the external sensor connections are correct.

Refer to the Sensor Selection, Frequency Display and Sensor Min/Max sections of Chapter 2 for information that can assist in troubleshooting sensor problems.

1-5

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Contents SQM-160 Safety Information Safety SymbolsLimitation of Warranty Warranty InformationReturn Policy Chapter Options Table of Contents Chapter Quick StartChapter Operation Chapter MonComm SoftwareChapter Maintenance AppendixInstallation Chapter Quick Start IntroductionChapter Quick Start Front Panel ControlsChapter Quick Start Rear Panel Rear Panel ConnectionsChapter Quick Start System Connections System ComponentsChapter Quick Start Film Setup Chapter Quick Start Depositing a Film Chapter Operation Introduction Menu SelectionChapter Operation Film Parameters Setup Film Selection Film Parameters Menu Sub-Menu Description Range Default UnitsDisplay Chapter Operation System Parameters Setup Timebase SIM Mode FRQ Disp Rate RES Ratefilt Baudrate Etch System Parameters Menu Sub-MenuDisplay xTOOLING FMIN/MAX Freq MIN Freq MAXChapter Operation Sensor Selection Chapter Operation Sensor Min/Max Frequency Chapter Operation Sensor Tooling Chapter Operation Rate/Thickness or Frequency Display Crystal Life DisplayChapter Operation Zero Thickness Simulate ModeShutter Operation Chapter Options Introduction Chapter Options Four Sensor Card Analog Output CardChapter MonComm Software Introduction Run MonCommTo add a new film to the Films List Chapter MonComm Software Add and Delete FilmsTo delete a film from the Films List To remove a film from the Download List Chapter MonComm Software Download FilmsTo add or replace a film in the Download List To download the films in the Download ListChapter MonComm Software Graph Data To Adjust the Graph’s Scope Save DataLoad Defaults Chapter MonComm Software Edit System ParametersChapter Maintenance Introduction Fuse ReplacementAppendix Material Parameters Appendix Specifications Pins Type Description Relay I/O Connector Rear ViewAppendix O Connections Declares that the product SafetyAppendix Declaration of Conformity Product Model SQM-160 Product Options All Options