Sigma SQM-160 manual Chapter Operation Zero Thickness, Shutter Operation, Simulate Mode

Page 22

Chapter 2

Operation

2.9Zero Thickness

Before starting each film deposition, you will probably want to reset the SQM-160 Thickness value to zero. To zero Thickness:

1. Press the Zero switch in the front panel Control section.

In addition to zeroing Thickness, pressing the Zero switch has these effects:

1.The Time display is reset to its programmed value, and starts counting down.

2.The Thickness Setpoint and Timer relays open.

3.The Time SP, Thk SP, and Final Thk LEDs turn off.

2.10Shutter Operation

The SQM-160 Shutter Relay normally controls the source material shutter. To open or close the Shutter Relay:

1. Press the Shutter switch in the front panel Control section.

The Open and Closed LEDs light to indicate the Shutter relay status.

2.11Simulate Mode

In Simulate Mode, the SQM-160 simulates attached sensors. It is an easy way to become familiar with the SQM-160 front panel controls and programming. In Simulate Mode you can open/close the shutter to simulate deposition, zero readings, and display crystal life. You can also test the Time and Thickness setpoint relays and LEDs.

To enter Simulate Mode:

1.Press Program to enter program mode.

2.Press Prev to enter the System Parameters Menu

3.Press Next until SIM MODE is shown.

4.Turn the Control Knob left or right to enable and disable Simulate Mode.

5.Depress the Control Knob to accept the value.

6.Press Program to exit the System Parameters Menu and return to normal mode.

2-11

Image 22
Contents SQM-160 Safety Information Safety SymbolsLimitation of Warranty Warranty InformationReturn Policy Chapter Options Table of Contents Chapter Quick StartChapter Operation Chapter MonComm SoftwareChapter Maintenance AppendixInstallation Chapter Quick Start IntroductionChapter Quick Start Front Panel ControlsChapter Quick Start Rear Panel Rear Panel ConnectionsChapter Quick Start System Connections System ComponentsChapter Quick Start Film Setup Chapter Quick Start Depositing a Film Chapter Operation Introduction Menu SelectionChapter Operation Film Parameters Setup Film Selection Film Parameters Menu Sub-Menu Description Range Default UnitsDisplay Chapter Operation System Parameters Setup Timebase SIM Mode FRQ Disp Rate RES Ratefilt Baudrate Etch System Parameters Menu Sub-MenuDisplay xTOOLING FMIN/MAX Freq MIN Freq MAXChapter Operation Sensor Selection Chapter Operation Sensor Min/Max Frequency Chapter Operation Sensor Tooling Chapter Operation Rate/Thickness or Frequency Display Crystal Life DisplayChapter Operation Zero Thickness Simulate ModeShutter Operation Chapter Options Introduction Chapter Options Four Sensor Card Analog Output CardChapter MonComm Software Introduction Run MonCommTo add a new film to the Films List Chapter MonComm Software Add and Delete FilmsTo delete a film from the Films List To remove a film from the Download List Chapter MonComm Software Download FilmsTo add or replace a film in the Download List To download the films in the Download ListChapter MonComm Software Graph Data To Adjust the Graph’s Scope Save DataLoad Defaults Chapter MonComm Software Edit System ParametersChapter Maintenance Introduction Fuse ReplacementAppendix Material Parameters Appendix Specifications Pins Type Description Relay I/O Connector Rear ViewAppendix O Connections Declares that the product SafetyAppendix Declaration of Conformity Product Model SQM-160 Product Options All Options