Sigma SQM-160 manual Chapter Operation Rate/Thickness or Frequency Display, Crystal Life Display

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Chapter 2

Operation

2.7Rate/Thickness or Frequency Display

The SQM-160 determines deposition rate and thickness by measuring the frequency shift of a crystal oscillator over time. In some applications, the actual crystal frequency is desired. Displaying crystal frequency can also be useful in troubleshooting sensor operation.

To select Rate/Thickness, or Frequency displays:

1.Press Program to enter program mode.

2.Press Prev to enter the System Parameters Menu

3.Press Next until FRQ DISP is shown.

4.Turn the Control Knob left or right to select the desired display mode.

5.Depress the Control Knob to accept the value.

6.Press Program to exit the System Parameters Menu and return to normal mode.

2.8Crystal Life Display

The SQM-160 calculates the remaining crystal life based on the FMin/Max values set in the System Parameters Menu (see Section 2.5).

To display the remaining crystal life for the sensors used by the currently active film:

1.Press the Xtal Life switch in the front panel Control section.

2.The sensor is shown in Display 1 , the % remaining life, is shown in Display2 .

3.Turn the Control Knob to display the % life of other sensors active for this film.

4.Press Xtal Life to return to normal rate/thickness, or frequency display.

Note: You cannot enter program mode while the crystal life display is active.

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Contents SQM-160 Safety Symbols Safety InformationWarranty Information Limitation of WarrantyReturn Policy Chapter Operation Table of Contents Chapter Quick StartChapter Options Chapter MonComm SoftwareAppendix Chapter MaintenanceChapter Quick Start Introduction InstallationFront Panel Controls Chapter Quick StartRear Panel Connections Chapter Quick Start Rear PanelSystem Components Chapter Quick Start System ConnectionsChapter Quick Start Film Setup Chapter Quick Start Depositing a Film Menu Selection Chapter Operation IntroductionChapter Operation Film Parameters Setup Description Range Default Units Film Selection Film Parameters Menu Sub-MenuDisplay Chapter Operation System Parameters Setup System Parameters Menu Sub-Menu Timebase SIM Mode FRQ Disp Rate RES Ratefilt Baudrate EtchFMIN/MAX Freq MIN Freq MAX Display xTOOLINGChapter Operation Sensor Selection Chapter Operation Sensor Min/Max Frequency Chapter Operation Sensor Tooling Crystal Life Display Chapter Operation Rate/Thickness or Frequency DisplaySimulate Mode Chapter Operation Zero ThicknessShutter Operation Chapter Options Introduction Analog Output Card Chapter Options Four Sensor CardRun MonComm Chapter MonComm Software IntroductionChapter MonComm Software Add and Delete Films To add a new film to the Films ListTo delete a film from the Films List To add or replace a film in the Download List Chapter MonComm Software Download FilmsTo remove a film from the Download List To download the films in the Download ListChapter MonComm Software Graph Data Save Data To Adjust the Graph’s ScopeChapter MonComm Software Edit System Parameters Load DefaultsFuse Replacement Chapter Maintenance IntroductionAppendix Material Parameters Appendix Specifications Relay I/O Connector Rear View Pins Type DescriptionAppendix O Connections Appendix Declaration of Conformity SafetyDeclares that the product Product Model SQM-160 Product Options All Options