Sigma SQM-160 manual Chapter Quick Start, Front Panel Controls

Page 7

Chapter 1

Quick Start

1.2Front Panel

 

Display1

Display2

 

 

Crystal Status LEDs

 

 

 

 

 

 

 

 

 

 

Control Knob

Rate A/s

 

Thickness kA

1

2

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

3

4

 

 

 

 

 

 

 

 

5

6

 

 

Z e r o

O p e n

 

 

 

Time SP

Crystal Status

 

 

 

 

Time

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

C l o s e d

 

 

 

Thk SP

 

 

 

 

 

 

 

 

 

 

 

 

 

Xtal Life

Shutter

 

 

 

 

Next

P r e v

Clear

Program

 

 

 

 

 

Final Thk

 

 

 

 

 

 

 

S i g m a

 

SQM-160

 

 

 

 

Control

Σ i n s t r u m e n t s

Rate/Thickness Monitor

 

Configuration

 

 

Control Section

 

 

Setpoint LEDs

 

Configuration Section

Front Panel Controls

Display 1

Displays rate and thickness in normal operation.

 

Displays setup parameter name in program mode.

Display 2

Displays deposition time in normal operation.

 

Displays setup parameter value in program mode.

Control

Zero thickness reading. Toggle Display 1 between Crystal Life

Section

and Rate/Thickness readings. Toggle shutter relay on/off.

Configuration

Program enters setup mode. Next/Prev moves thru menus.

Section

Clear cancels change and returns value to its original setting.

Setpoint LEDs

Illuminate when the indicated setpoint is reached.

Crystal Status

Illuminate when a crystal is active and operating.

LEDs

Flashes when an active crystal fails.

Control Knob

Used to adjust values or scroll though menu selections.

 

Pushing the control knob stores the current setting.

1-2

Image 7
Contents SQM-160 Safety Symbols Safety InformationLimitation of Warranty Warranty InformationReturn Policy Chapter MonComm Software Table of Contents Chapter Quick StartChapter Operation Chapter OptionsAppendix Chapter MaintenanceChapter Quick Start Introduction InstallationFront Panel Controls Chapter Quick StartRear Panel Connections Chapter Quick Start Rear PanelSystem Components Chapter Quick Start System ConnectionsChapter Quick Start Film Setup Chapter Quick Start Depositing a Film Menu Selection Chapter Operation IntroductionChapter Operation Film Parameters Setup Film Selection Film Parameters Menu Sub-Menu Description Range Default UnitsDisplay Chapter Operation System Parameters Setup System Parameters Menu Sub-Menu Timebase SIM Mode FRQ Disp Rate RES Ratefilt Baudrate EtchFMIN/MAX Freq MIN Freq MAX Display xTOOLINGChapter Operation Sensor Selection Chapter Operation Sensor Min/Max Frequency Chapter Operation Sensor Tooling Crystal Life Display Chapter Operation Rate/Thickness or Frequency DisplayChapter Operation Zero Thickness Simulate ModeShutter Operation Chapter Options Introduction Analog Output Card Chapter Options Four Sensor CardRun MonComm Chapter MonComm Software IntroductionTo add a new film to the Films List Chapter MonComm Software Add and Delete FilmsTo delete a film from the Films List To download the films in the Download List Chapter MonComm Software Download FilmsTo add or replace a film in the Download List To remove a film from the Download ListChapter MonComm Software Graph Data Save Data To Adjust the Graph’s ScopeChapter MonComm Software Edit System Parameters Load DefaultsFuse Replacement Chapter Maintenance IntroductionAppendix Material Parameters Appendix Specifications Pins Type Description Relay I/O Connector Rear ViewAppendix O Connections Product Model SQM-160 Product Options All Options SafetyAppendix Declaration of Conformity Declares that the product