Sigma SQM-160 manual Chapter Operation Film Parameters Setup

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Chapter 2

Operation

2.2Film Parameters Setup

The Film Parameters Menu programs the SQM-160 for the materials that will be deposited as thin films. Nine films can be stored, but only one film is active at any time. To program film parameters:

1.Press Program to enter program mode.

2.Use the Control Knob to scroll to the desired Film # (1-9).

3.Depress the Control Knob or Next to enter the film parameters menu for the selected film.

4.Use Next and Prev to move through the film parameters, shown in Display 1 .

5.Use the Control Knob to adjust the parameter value, shown in Display2 , to the desired setting.

6.Press Clear to abandon the change and return to the original setting.

7.Depress the Control Knob to save the displayed value, or press Next to exit without saving the value. (Pressing either one will take you to the next material parameter.)

8.Press Program to exit the Film Parameters Menu and return to normal mode.

Notes:

1.Refer to the section on Sensor Selection for instructions on setting SENS AVG.

2.A setting of zero for FINL THK, THK SET or TIME SET will disable that function.

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Contents SQM-160 Safety Symbols Safety InformationLimitation of Warranty Warranty InformationReturn Policy Chapter Operation Table of Contents Chapter Quick StartChapter Options Chapter MonComm SoftwareAppendix Chapter MaintenanceChapter Quick Start Introduction InstallationFront Panel Controls Chapter Quick StartRear Panel Connections Chapter Quick Start Rear PanelSystem Components Chapter Quick Start System ConnectionsChapter Quick Start Film Setup Chapter Quick Start Depositing a Film Menu Selection Chapter Operation IntroductionChapter Operation Film Parameters Setup Film Selection Film Parameters Menu Sub-Menu Description Range Default UnitsDisplay Chapter Operation System Parameters Setup System Parameters Menu Sub-Menu Timebase SIM Mode FRQ Disp Rate RES Ratefilt Baudrate EtchFMIN/MAX Freq MIN Freq MAX Display xTOOLINGChapter Operation Sensor Selection Chapter Operation Sensor Min/Max Frequency Chapter Operation Sensor Tooling Crystal Life Display Chapter Operation Rate/Thickness or Frequency DisplayChapter Operation Zero Thickness Simulate ModeShutter Operation Chapter Options Introduction Analog Output Card Chapter Options Four Sensor CardRun MonComm Chapter MonComm Software IntroductionTo add a new film to the Films List Chapter MonComm Software Add and Delete FilmsTo delete a film from the Films List To add or replace a film in the Download List Chapter MonComm Software Download FilmsTo remove a film from the Download List To download the films in the Download ListChapter MonComm Software Graph Data Save Data To Adjust the Graph’s ScopeChapter MonComm Software Edit System Parameters Load DefaultsFuse Replacement Chapter Maintenance IntroductionAppendix Material Parameters Appendix Specifications Pins Type Description Relay I/O Connector Rear ViewAppendix O Connections Appendix Declaration of Conformity SafetyDeclares that the product Product Model SQM-160 Product Options All Options