Sigma SQM-160 manual Chapter Quick Start Introduction, Installation

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Chapter 1

Quick Start

1.0Introduction

Congratulations on your purchase of the SQM-160 Deposition Rate/Thickness Monitor. The SQM-160 is an easy-to-use instrument for measuring many types of thin film coatings. This chapter will help to get you up and running quickly. Please review the entire manual for detailed operational, programming, and safety information.

1.1Installation

Refer to Sections 1.3 and 1.4 for detailed system hookup information.

Rack

The SQM-160 occupies a 3.5” high, half-rack space. An

Installation

optional kit (900-008) is available to adapt to a full rack. Install

 

the unit in a 19” rack with the supplied hardware.

Power

WARNING: The SQM-160 is shipped with a ½ A Fuse for use

Connection

with 90–120 VAC. If your line voltage is 180–240 VAC, replace

 

the fuse with the ¼A fuse included with your SQM-160.

 

WARNING: Verify that the Voltage Selector Switch located next

 

to the power switch matches your line voltage.

 

Plug the SQM-160 into your power source with the included

 

power cord.

Sensor

Connect the BNC cables and oscillator from your vacuum

Connections

chamber feedthrough to the desired SQM-160 Sensor Input(s).

Digital I/O

Refer to Appendix C for details on wiring digital I/O to the

Connections

SQM-160 Relay I/O connector.

Computer

If you would like to use the supplied Windows software to

Connection

collect data or program the SQM-160, attach a 9 pin straight-

 

thru cable from the SQM-160 RS-232 connector to your

 

computer’s serial port.

Option

If you purchased the Analog Output Option (502-021), connect

Connections

a BNC cable form the Rate or Thickness connector to your

 

chart recorder.

Move the rear panel power switch to the On () position. The SQM-160 will briefly display its software version, then go to normal operating mode.

1-1

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Contents SQM-160 Safety Information Safety SymbolsWarranty Information Limitation of WarrantyReturn Policy Chapter Options Table of Contents Chapter Quick StartChapter Operation Chapter MonComm SoftwareChapter Maintenance AppendixInstallation Chapter Quick Start IntroductionChapter Quick Start Front Panel ControlsChapter Quick Start Rear Panel Rear Panel ConnectionsChapter Quick Start System Connections System ComponentsChapter Quick Start Film Setup Chapter Quick Start Depositing a Film Chapter Operation Introduction Menu SelectionChapter Operation Film Parameters Setup Description Range Default Units Film Selection Film Parameters Menu Sub-MenuDisplay Chapter Operation System Parameters Setup Timebase SIM Mode FRQ Disp Rate RES Ratefilt Baudrate Etch System Parameters Menu Sub-MenuDisplay xTOOLING FMIN/MAX Freq MIN Freq MAXChapter Operation Sensor Selection Chapter Operation Sensor Min/Max Frequency Chapter Operation Sensor Tooling Chapter Operation Rate/Thickness or Frequency Display Crystal Life DisplaySimulate Mode Chapter Operation Zero ThicknessShutter Operation Chapter Options Introduction Chapter Options Four Sensor Card Analog Output CardChapter MonComm Software Introduction Run MonCommChapter MonComm Software Add and Delete Films To add a new film to the Films ListTo delete a film from the Films List To remove a film from the Download List Chapter MonComm Software Download FilmsTo add or replace a film in the Download List To download the films in the Download ListChapter MonComm Software Graph Data To Adjust the Graph’s Scope Save DataLoad Defaults Chapter MonComm Software Edit System ParametersChapter Maintenance Introduction Fuse ReplacementAppendix Material Parameters Appendix Specifications Relay I/O Connector Rear View Pins Type DescriptionAppendix O Connections Declares that the product SafetyAppendix Declaration of Conformity Product Model SQM-160 Product Options All Options