9600 Compressor Installation, Operation, and Maintenance
Cryopump Power Phase Switch
HELIX TECHNOLOGY CORPORATION
NOTE: The Cryopump Power Phase Switch is behind the system circuit breaker cover.
The Cryopump Power Phase Switch matches the output power phase of the 9600 compressor to that of the cryopump. The switch is set to the two or three phase position based upon cryopump power requirements. Refer to Section 3 - Installation for more information.
Compressor Remote Connector
The Compressor Remote Connector is a
NOTE: The Compressor is shipped with a mating plug which must remain installed in the Compressor Remote Connector to ensure Compressor operation when the Compressor remote feature is not being used.
Table 1-6: Compressor Remote Connector Pin Assignments
Identifier | Function |
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A and B | Compressor Remote Control - Make = ON, Break = OFF |
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Supply Gas Coupling
The Supply Gas Coupling provides a connection for high pressure compressed helium to the cryopump cold head. Refer to
Multiple On-Board Cryopump Connections
The
P/N 8040540 |