9600 Compressor Installation, Operation, and Maintenance
HELIX TECHNOLOGY CORPORATION
Section 1 - 9600 Compressor Description
General
This manual provides the information required to install, operate, and maintain the
NOTE: All personnel with installation, operation, and maintenance responsibilities should become familiar with the contents of both the 9600 Compressor Installation, Operation, Maintenance, and appropriate cryopump manuals to ensure safe, high quality, and reliable system performance.
Benefits
The 9600 Compressor is a universal compressor that accepts
The 9600 Compressor design eliminates the use of
CAUTION
Refer to Appendix A to contact the local Customer Support Center for information on connecting 9600 Compressors to a manifold with other
Compressor Configurations
The 9600 Compressor supports either
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