9600 Compressor Installation, Operation, and Maintenance

CTI-CRYOGENICS

HELIX TECHNOLOGY CORPORATION

Section 1 - 9600 Compressor Description

General

This manual provides the information required to install, operate, and maintain the CTI-CRYOGENICS 9600 Compressor.

NOTE: All personnel with installation, operation, and maintenance responsibilities should become familiar with the contents of both the 9600 Compressor Installation, Operation, Maintenance, and appropriate cryopump manuals to ensure safe, high quality, and reliable system performance.

Benefits

The 9600 Compressor is a universal compressor that accepts three-phase 50Hz or 60 Hz power input and provides two-phase or three- phase 60Hz power output to On-Board or Cryo-Torr Cryopumps.

The 9600 Compressor design eliminates the use of three-phase motor controllers and/or frequency converters and significantly reduces the amount of equipment required and cost associated with the Cryopump power circuit.

CAUTION

Refer to Appendix A to contact the local Customer Support Center for information on connecting 9600 Compressors to a manifold with other CTI-CRYOGENICS compressors.

Compressor Configurations

The 9600 Compressor supports either On-Board or Cryo-Torr Cryopumps. For multiple cryopump installations, an On-Board Splitter Box or Cryo- Torr Interface can be used for cold head power distribution that reduces total cable requirements as shown in Figure 1-5 and 1-6.

P/N 8040540

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Olicom 9600 manual Compressor Description, General, Benefits, Compressor Configurations