Olicom 9600 manual Recommended Multiple Cryo-Torr Cryopump Installation

9600 Compressor Installation, Operation, and Maintenance

CTI-CRYOGENICS

HELIX TECHNOLOGY CORPORATION

NOTE: The Cryo-Torr Interface can be installed at the process tool containing the cryopumps as shown in Figure 3-8 or near the Compressor as shown in Figure 3-9. CTI-CRYOGENICS recommends that the Cryo- Torr Interface be installed at the process tool to reduce cable requirements.

HELIUM SUPPLY

HELIUM RETURN

REMOTE

WATERPOWER

CRYO-TORR

INTERFACE

CRYOPUMP POWER CABLE

USER REMOTE

(FROM VACUUM SYSTEM)

Figure 3-8: Recommended Multiple Cryo-Torr Cryopump Installation

P/N 8040540 3-15