Olicom 9600 manual Single Cryo-Torr Cryopump Connections, Single Cryo-Torr Cryopump Installation

Installation

CTI-CRYOGENICS

HELIX TECHNOLOGY CORPORATION

Single Cryo-Torr Cryopump Connections

CAUTION

Make sure the Compressor power is OFF before making any connections to the rear panel.

1.Connect the Supply and Return lines to the 9600 Compressor as described in Connecting/Disconnecting Helium Flex Lines within this section.

2.Connect one end of the Cryopump cold head cable to the CRYOPUMP ELECTRICAL OUTLET on the rear panel of the Compressor as shown in Figure 3-5. Connect the opposite end of the cold head cable to the cryopump cold head cable connector as shown in Figure 3-5.

HELIUM SUPPLY

HELIUM RETURN

REMOTE

CRYO-TORR

POWER CABLE

WATERPOWER

Figure 3-5: Single Cryo-Torr Cryopump Installation

3-10 P/N 8040540