9600 Compressor Installation, Operation, and Maintenance

CTI-CRYOGENICS

HELIX TECHNOLOGY CORPORATION

Multiple On-Board Cryopump Connections

CAUTION

Make sure the Compressor power is OFF before making any connections to the rear panel.

Helium Line Connections

CAUTION

The use of several compressors on a single manifold feeding a common supply header and a common return header requires special precautions. Contact CTI-CRYOGENICS for a review of the intended installation and for specific technical instructions. The use of a 9600 compressor on a manifold with other CTI-CRYOGENICS compressor models requires a reduction of the helium charge pressure to 200 - 210 psig charge pressure to avoid helium safety valves from inadvertently venting. Refer to Section 4 - Operation and Section 5 - Maintenance for more information.

1.Connect the Supply and Return lines to the 9600 Compressor as described in Connecting/Disconnecting Helium Flex Lines within this section.

2.Connect the Gas Return Line to the customer supplied helium manifold and then to the GAS RETURN connector on the On-Board Cryopump.

3.Connect the Gas Supply Line to the customer supplied helium manifold and then to the GAS SUPPLY connector on the On-Board Cryopump.

P/N 8040540

3-11

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Olicom 9600 manual Multiple On-Board Cryopump Connections, Helium Line Connections