Olicom 9600 manual Figures

9600 Compressor Installation, Operation, and Maintenance

Table of Contents (continued)

Appendix A - Customer Support Information

Appendix B - Flow Diagram

Appendix C - Troubleshooting Procedures

Appendix D - Schematic

Figures

Figure 1-1: 9600 Compressor		. 1-3
Figure 1-2: 9600	Compressor Dimensions	. 1-4
Figure 1-3: Water Flow Rate versus Pressure Drop		. 1-6
Figure 1-4: 9600	Compressor Rear View Component Locations	. 1-8
Figure 1-5: 9600	Compressor Connected to Multiple On-Board Cryopumps . 1-12
Figure 1-6: 9600	Compressor Connected to Multiple Cryo-Torr Cryopumps	1-13

Figure 2-1: Using the Shipping Carton Ramp . . . . . . . . . . . . . . . . . . . . . . . . . . 2-2

Figure 3-1: 9600 Compressor Installation Flowchart . . . . . . . . . . . . . . . . . . . . 3-2

Figure 3-2: 9600 Compressor Circuit Breaker Terminals (Cover Removed) . . 3-5

Figure 3-3: Connecting/Disconnecting Helium Flex Line Self

Sealing Couplings . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . 3-8

Figure 3-4: Single On-Board Cryopump Connections . . . . . . . . . . . . . . . . . . . 3-9

Figure 3-5: Single Cryo-Torr Cryopump Installation . . . . . . . . . . . . . . . . . . . 3-10

Figure 3-6: Recommended Multiple On-Board Cryopump or

Waterpump Installation (Splitter Box located at Process Tool) . . 3-12

Figure 3-7: Alternative Multiple On-Board Cryopump or Waterpump Installation (Splitter Box located at Compressor) . . . . . . . . . . . . . . . . . . . . . . . 3-13

Figure 3-8: Recommended Multiple Cryo-Torr Cryopump Installation . . . . . 3-15

Figure 3-9: Alternative Multiple Cryo-Torr Cryopump Installation . . . . . . . . 3-16

P/N 8040540 6