Installation | Olicom 9600 guide

9600 Compressor Installation, Operation, and Maintenance

CTI-CRYOGENICS

HELIX TECHNOLOGY CORPORATION

Section 3 - Installation

Introduction

Section 3 provides you with the information required to install the 9600 Compressor and connect it to single or multiple On-Board or Cryo-Torr Cryopump configurations.

Figure 3-1 highlights the major tasks for Compressor installation and refers to the appropriate installation procedures within this section.

P/N 8040540

3-1

Image 24

Olicom 9600 manual Installation

Contents

Compressor Installation, Operation, Maintenance Instructions 8040540 Rev 12/2004 Helix Page Table of Contents Installation MaintenanceOperation Figures Tables Compressor Configurations 9600 Compressor DescriptionGeneral Benefits System Documentation CTI-CRYOGENICS Helium Refrigeration System 9600 Compressor Specifications Dimensions Weight Compressor WeightElectrical Input Specifications Electrical Cooling Water Specifications Cooling Water General Compressor Operating Specifications General Component Description 9600 Compressor Rear View Component Locations Power on Indicator Power InletSystem Circuit Breaker Control Circuit Breaker Return Gas Coupling Cooling Water OUTCryopump Electrical Outlet Cryopump Electrical Outlet Pin Assignments Cryopump Power Phase Switch Compressor Remote ConnectorCompressor Remote Connector Pin Assignments Multiple On-Board Cryopump Connections 9600 Compressor Connected to Multiple On-Board Cryopumps Multiple Cryo-Torr Cryopump Connections 9600 Compressor Connected to Multiple Cryo-Torr Cryopumps CTI-CRYOGENICS Unpacking and Inspection IntroductionShipping Carton Inspection Removal from Shipping Carton Shipping Carton Contents Compressor InspectionCompressor Helium Static Pressure Verification Installation END Supply and Return Water Line Connections Hard Water LinesFlexible Water Lines Power Cable Preparation Electrical Connections 9600 Compressor Circuit Breaker Terminals Cover Removed Phase Check Proceed with Cryopump Power Phase Switch Setting Connecting/Disconnecting Helium Flex Lines Cryopump Power Phase Switch SettingConnecting Disconnecting Single On-Board Cryopump Connections Single On-Board Cryopump Connections Single Cryo-Torr Cryopump Installation Single Cryo-Torr Cryopump Connections Helium Line Connections Power Cable Connections Multiple Cryo-Torr Cryopump Connections CTI-CRYOGENICS Recommended Multiple Cryo-Torr Cryopump Installation Alternative Multiple Cryo-Torr Cryopump Installation Adjusting System Helium Pressure OperationStatic Helium System Pressure Verification 9600 Compressor Helium Static Charge Compressor Operation Replacement of Helium Circuit Components CTI-CRYOGENICS Maintenance Scheduled MaintenanceSuggested Maintenance Equipment Adsorber Replacement Disconnecting Self Sealing Couplings Date Reducing Helium Pressure 9600 Compressor Helium Pressure Control Components Increasing Helium Pressure Adding Helium CTI-CRYOGENICS Appendix a Customer Support Information MailProduct Information Page Appendix B Flow Diagram Figure B-19600 Compressor Flow Diagram Appendix B Flow Diagram Appendix C Troubleshooting Procedures Troubleshooting the CompressorTechnical Inquiries Table C-1 Compressor Troubleshooting Procedures Compressor Remote Appendix a to contact CTI-CRYOGENICS Appendix D Schematic Figure D-19600 Motor Drive Compressor Schematic