
9600 Compressor Installation, Operation, and Maintenance
HELIX TECHNOLOGY CORPORATION
Multiple Cryo-Torr Cryopump Connections
The
HELIUM SUPPLY |
HELIUM RETURN |
REMOTE |
WATERPOWER
INTERFACE |
CRYOPUMP POWER
CABLE
USER REMOTE
(FROM VACUUM SYSTEM)
Figure 1-6: 9600 Compressor Connected to Multiple Cryo-Torr Cryopumps
NOTE: Your installation (number of pumps per compressor) will vary based upon the
P/N 8040540 |