9600 Compressor Installation, Operation, and Maintenance

CTI-CRYOGENICS

HELIX TECHNOLOGY CORPORATION

Single On-Board Cryopump Connections

CAUTION

Make sure the Compressor power is OFF before making any connections to the rear panel.

1.Connect the Supply and Return lines to the 9600 Compressor as described in Connecting/Disconnecting Helium Flex Lines within this section.

2.Connect one end of the Cryopump cold head cable to the CRYOPUMP ELECTRICAL OUTLET on the rear panel of the Compressor as shown in Figure 3-4.

3.Connect the opposite end of the cold head cable to the cryopump cold head cable connector.

HELIUM SUPPLY

HELIUM RETURN

REMOTE

ON-BOARD

POWER CABLE

WATERPOWER

Figure 3-4: Single On-Board Cryopump Connections

P/N 8040540

3-9

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Image 32
Olicom 9600 manual Single On-Board Cryopump Connections