9600 Compressor Description
HELIX TECHNOLOGY CORPORATION
Return Gas Coupling
The Return Gas Coupling returns the helium, which has been cycled through the cryopump, back to the Compressor. Refer to
Cooling Water IN
The Cooling Water IN connector provides water to the Compressor from your facility to cool the Compressor during operation. The connector thread size is a 1/2 in. female pipe thread. The water must meet the specifications outlined in Table
Cooling Water OUT
The Cooling Water OUT connector returns the water that has been used to cool the Compressor to your facility. The connector thread size is a
1/2 in. female pipe thread. Refer to Section 3 - Installation for more information on cooling water connections.
Cryopump Electrical Outlet
The Cryopump Electrical Outlet provide power to a single
Table 1-5: Cryopump Electrical Outlet Pin Assignments
Identifier | Function |
|
|
A and B | Heater Power - 208 VAC nominal |
CCenter tap for D and E
D and E 24 VCT @ 4.6 Amps
|
|
J | Chassis Ground |
|
|
K | Not Used |
P/N 8040540 |