Olicom 9600 manual End

Installation

START

Supply and Return Water Line Connections

(refer to page 3-3)

Electrical Connections

(refer to page 3-4)

Phase Check

(refer to page 3-6)

2Ø or 3Ø Cryopump Power?

(refer to page 3-7)

Connect/Disconnect Helium Flexlines

(refer to page 3-7)

Single or Multiple

Cryopump

Installation?

CTI-CRYOGENICS

HELIX TECHNOLOGY CORPORATION

Single Cryopump Connections

(refer to page 3-9)

Multiple Cryopump Connections

(refer to page 3-11)

Refer to

Section 4 - Operation

END

Figure 3-1: 9600 Compressor Installation Flowchart

3-2 P/N 8040540