
Installation
START
Supply and Return Water Line Connections
(refer to page
Electrical Connections
(refer to page
Phase Check
(refer to page
2Ø or 3Ø Cryopump Power?
(refer to page
Connect/Disconnect Helium Flexlines
(refer to page
Single or Multiple
Cryopump
Installation?
CTI-CRYOGENICS
HELIX TECHNOLOGY CORPORATION
Single Cryopump Connections
(refer to page
Multiple Cryopump Connections
(refer to page
Refer to
Section 4 - Operation
END
Figure 3-1: 9600 Compressor Installation Flowchart
P/N 8040540 |