Olicom 9600 - page 39

Installation

3-16 P/N 8040540

HELIX TECHNOLOGY CORPORATION

TI CRYOGENICS

Figure 3-9: Alternative Multiple Cryo-Torr Cryopump Installation

CRYOPUMP POWER CABLES

USER REMOTE

(FROM VACUUM SYSTEM)

HELIUM SUPPLY HELIUM RETURN

WATER POWER

CRYO-TORR

INTERFACE

REMOTE

Contents

Main ELIXH Page Table of Contents Section 1 - 9600 Compressor Description Section 2 - Unpacking and Ins pection Section 3 - Installation Section 4 - Operation Section 5 - Maintenance Figures Table s Section 1 - 9600 Compressor Description General Benefits CAUTION Compressor Configurations System Documentation CTI-CRYOGENICS Helium Refrigeration System Page Specifications CAUTION Page Page Page 9600 Compressor Description HELIX TECHNOLOGY CORPORATION 1-8 P/N 8040540 Component Description Figure 1-4: 9600 Compressor Rear View Component Locations Page Page Multiple On-Board Cryopump Connecti ons Page Multiple Cryo-Torr Cryopump Connections Page Section 2 - Unpacking and Inspection Introduction Shipping Carton Inspection Removal from Shipping Carton Compressor Inspec t i o n Section 3 - Installation Figure 3-1: 9600 Compressor Installation Flowchart START END Supply and Return Water Line Connecti ons Electrical Connections XYZ Page Connecting/Disconnecting Helium Flex Lines Page Single On-Board Cryopump Connections Page Multiple On-Board Cryopump Connections Page Multiple Cryo-Torr Cryopump Connections Page Page Page Section 4 - Operation Adjusting System Helium Pressure Static Helium System Pressure Verification Compressor Operation Replacement of Helium Circuit Components Page Section 5 - Maintenance Scheduled Maintenance Page Page Adjusting System Helium Pressure Page Page Prelimary Appendix A - Customer Support Information Customer Support Center Locations Guaranteed Up-Time Support (GUTS) E-mail Page Page Page Appendix C - Troubleshooting Procedures Troubleshooting the Compressor Technical Inquiries