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Sigma
SQC-122c manual
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Contents
Main
Safety Information
Safety Symbols
Warranty Information
Limitation of Warranty
Return Policy
Table of Contents
Chapter 2 Operation
Chapter 3 Menus
Chapter 4 Options
Page
1-1
1.0 Introduction
1.1 Thin Film Process Overview
Page
1-3
1.3 Rear Panel
?
1-4
1.4 System Connections
1-5
1.5 Installation
1-6
1.6 Process Setup
1-7
1-8
1.7 Depositing a Film
Page
2-1
2.0 Introduction
2.1 Definitions
2.2 Defining a Film
2-2
2-3
2-4
2-5
2.3 Defining a Process
2-6
2-7
2.4 Sensor Setup
2-8
2-9
2-10
2.5 Source Setup
2-11
2.6 Running a Process
2-12
2-13
2-14
2-15
2.7 Loop Tuning
2-16
2-17
2.8 Troubleshooting
2-18
Page
3-1
3.0 Introduction
3-2
3.1 Main Menu
3-3
3-4
3.2 Next Menu Screens
3-5
3.3 Quick Setup Menu
Quick Setup Menu
Quick Setup Menu
0.0 POWER(%)
Process Select Menu
3-6
3-7
3.4 Process Menus
3-8
3-9
3-10
3-11
3.5 Film Menus
3-12
3-13
3-14
3-15
3-16
3-17
3-18
3.6 System Parameters Menu
3-19
3-20
3-21
3.7 I/O Setup
3-22
Page
Chapter 4 Options
4-1
4.0 Introduction
4.1 Option Card
4.2 Full Rack Extender Installation
A. Material Parameters
B. Specifications
Page
C. I/O Connections
Page
D. Handheld Remote Controller
E. EC Declaration of Conformity