Chapter 3

Menus

3.1Main Menu

The default, power-up Main Screen display is shown below.

Next Menu

Quick Setup

THICKNESS(kA)

RATE(A/s)

P O W E R (% )

0.000

0.0

0.0

 

100.0

 

 

 

 

 

 

 

 

Process

Menu

Film

Menu

System Params

Start

50.0

0.0

0.0

12.5

25.0

37.5

50.0

 

 

Power (% vs. Time)

 

 

 

 

 

 

 

 

 

PHASE: Stopped

 

 

Process : My Process 1

Run Time : 0:00:00

 

Layer: 1 of 25

 

Final Thick : 0.1011

 

Film : Aluminum

 

Layer Rate : 11.1

 

Main Screen

The measured Thickness, Rate, and output Power values are always displayed along the top of the screen.

The graph displays either Rate, Rate Deviation, or output Power. The next section of the manual describes graph selection.

The status bar below the graph displays the current deposition phase. In Manual mode, Manual Power is displayed in the status bar. In Auto mode, the status bar will automatically sequence through the pre-condition, deposit, and feed/idle phases for each layer, as defined by the Process setup.

Below the status bar, important settings for the current process are shown. The next section explains other parameters that can be displayed in this screen area.

3-2

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Sigma SQC-122c manual Chapter Menus Main Menu, Default, power-up Main Screen display is shown below