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Sigma
SQC-122c
manual
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Models:
SQC-122c
1
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Specifications
Safety Symbols
Connector Wiring Relay Pins
Warranty
Quick Setup
Chapter Operation Loop Tuning
Power Input Fuse
Edit Mode Layer
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Chapter 3
Menus
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3-23
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Contents
SQC-122c Thin Film Deposition Controller User’s Guide
Safety Information
Safety Symbols
Return Policy
Warranty Information
Limitation of Warranty
Table of Contents Chapter Quick Start
Chapter Operation
Chapter Menus
Chapter Options
Appendix
Chapter Quick Start Introduction
Thin Film Process Overview
Chapter Quick Start Front Panel
Power Input Fuse
Chapter Quick Start Rear Panel
Chapter Quick Start System Connections
Chapter Quick Start Installation
Chapter Quick Start Process Setup
Power
Quick Setup
Select
Exit to Main
Edit Mode Layer
Chapter Quick Start
Chapter Quick Start Depositing a Film
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Defining a Film
Chapter Operation Introduction
Definitions
POWER%
POWER%
Deposition Controls Menu
Chapter Operation Defining a Process
Layer Edit Menu
Chapter Operation
Chapter Operation Sensor Setup
Tooling U n d e r 1 0 0 %
Chapter Operation
Chapter Operation Source Setup
Chapter Operation Running a Process
Chapter Operation
Next Menu Zero THICKNESSkA RATEA/s
824 55.3
Chapter Operation Loop Tuning
Chapter Operation
Chapter Operation Troubleshooting
No Readings, or Erratic Readings from Sensors
Incorrect Rate or Thickness Measurement
Poor Rate Stability
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Chapter Menus Introduction
Default, power-up Main Screen display is shown below
Chapter Menus Main Menu
Setup
Next
Menu Quick
Film
Chapter Menus Next Menu Screens
Chapter Menus Quick Setup Menu
Exit to Main Edit
Prev Layer
Next Layer
Chapter Menus
Chapter Menus Process Menus
Main Screen Prev Menu Select Edit Delete Control Knob
Main Screen Prev Menu Edit Cut Paste
Insert Layer Control Knob
POWER%
Exit to Main Prev Menu Edit Control Knob
Chapter Menus
Chapter Menus Film Menus
Main Screen Prev Menu Edit Delete Control Knob
Exit to Main Prev Menu Edit
Exit to Main Prev Menu Edit THICKNESSkA RATEA/s
Deposition Controls Menu
Chapter Menus
Chapter Menus
Chapter Menus
Chapter Menus System Parameters Menu
Chapter Menus
Chapter Menus
Chapter Menus I/O Setup
Mapping Menu
Relays Explanation closes when
Inputs Explanation high input causes
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Option Card
Full Rack Extender Installation
Chapter Options Introduction
Appendix Material Parameters
Appendix Specifications
General Specifications
Measurement
Source
Display
Appendix O Connections
Connector Wiring Relay Pins
Input Pins
Appendix
Appendix Handheld Remote Controller
Complies with the Essential Health and Safety Requirements
Appendix EC Declaration of Conformity
Declares that the product
Uses the following standards
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