Sigma SQC-122c manual Chapter Menus Introduction

Chapter 3 Menus

3.0Introduction

SQC-122c operation during deposition is accomplished by pressing one of the six SoftKeys along the left of the display. Five menus provide access to all programmable and operating functions:

Main	The Main Menu is displayed at power up. It provides the
Menu	SoftKey functions and display information necessary to run a
	thin film deposition.
	On the Main Menu, you can view additional sub-menus by
	repeatedly pressing the Next Menu SoftKey. These sub-
	menus are discussed in Section 3.2.
Quick Setup	Provides immediate access to the most commonly adjusted
Menu	parameters for the current process and layer.
Process	A process is a sequence of layers of deposited film(s). Each
Menu	layer in a process has a specific film, final thickness, and
	deposition rate(s) associated with it. These are accessed from
	the Process Menu.

Film Menu

A film is basically a material plus the setup information necessary to deposit that material. Settings on the Film Menu include pre/post conditioning, deposition error controls, and the physical chamber setup for that material.

System	System parameters control the overall operation of the SQC-
Parameters	122c. Tooling, crystal frequency, and operating modes are
Menu	examples of settings found on the System Parameters Menu.

The remainder of this chapter provides a detailed explanation of each menu and its settings.

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