Chapter 3

Menus

The Deposit Controls SoftKey displays these additional film settings: (Refer to section 2.2 for deposition control definitions.)

Exit to Main

Prev Menu

Edit

THICKNESS(kA)

 

RATE(A/s)

POWER(%)

0.000

0.0

 

0.0

 

Current: Process 1

 

EDITING: Film 1

 

 

 

 

 

 

Parameter

 

Value

 

Units

 

 

 

 

 

 

 

 

 

 

 

 

 

Shutter Delay

0:01:00

 

h:mm:ss

 

 

 

 

 

 

 

 

Capture

20.0

 

%

 

Control Error

 

(Ignore, Stop, Hold)

 

 

Setting

 

Hold

 

 

Error

18.0

 

%

 

Rate Sampling

 

(Cont,Time,Acc based)

 

 

Setting

 

Undefined

 

 

Accuracy Based

0.0

 

%

 

 

 

 

 

 

 

 

 

 

 

 

 

Exit to Main

Prev Menu

Edit

Deposition Controls Menu

Returns to the Main Menu.

Returns to the Film Edit Menu.

Selects the highlighted parameter for edit. SoftKey functions change to:

Next: Store parameter and move to next for editing.

Cancel: Stop editing and undo changes to selected parameter.

Enter: Stop editing and save values for selected parameter.

Control Knob: Turn to adjust value. Push to store value and move to next parameter.

Control Knob Scrolls through the list of deposition control parameters.

3-14

Page 47
Image 47
Sigma SQC-122c manual Deposition Controls Menu