Table of Contents |
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Chapter 1 | Quick Start |
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1.0 | Introduction | ||
1.1 | Thin Film Process Overview | ||
1.2 | System Connections | ||
1.3 | Front Panel | ||
1.4 | Rear Panel | ||
1.5 | Installation | ||
1.6 | Process Setup | ||
1.7 | Depositing a Film |
Chapter 2 | Operation |
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2.0 | Introduction | ||
2.1 | Definitions | ||
2.2 | Defining a Film | ||
2.3 | Defining a Process | ||
2.4 | Sensor Setup | ||
2.5 | Source Setup | ||
2.6 | Running a Process | ||
2.7 | Loop Tuning | ||
2.8 | Troubleshooting |
Chapter 3 | Menus |
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3.0 | Introduction | ||
3.1 | Main Menu | ||
3.2 | Next Menus | ||
3.3 | Quick Setup Menu | ||
3.4 | Process Menus | ||
3.5 | Film Menus | ||
3.6 | System Parameters Menu | ||
3.7 | I/O Setup | ||
Chapter 4 | Options |
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4.0 | Introduction | |
4.1 | Options Cards | |
4.2 | Full Rack Extender Installation |