Table of Contents

 

Chapter 1

Quick Start

 

1.0

Introduction

1-1

1.1

Thin Film Process Overview

1-1

1.2

System Connections

1-2

1.3

Front Panel

1-3

1.4

Rear Panel

1-4

1.5

Installation

1-5

1.6

Process Setup

1-6

1.7

Depositing a Film

1-8

Chapter 2

Operation

 

2.0

Introduction

2-1

2.1

Definitions

2-1

2.2

Defining a Film

2-1

2.3

Defining a Process

2-5

2.4

Sensor Setup

2-7

2.5

Source Setup

2-10

2.6

Running a Process

2-11

2.7

Loop Tuning

2-15

2.8

Troubleshooting

2-17

Chapter 3

Menus

 

3.0

Introduction

3-1

3.1

Main Menu

3-2

3.2

Next Menus

3-4

3.3

Quick Setup Menu

3-5

3.4

Process Menus

3-7

3.5

Film Menus

3-11

3.6

System Parameters Menu

3-18

3.7

I/O Setup

3-21

Chapter 4

Options

 

4.0

Introduction

4-1

4.1

Options Cards

4-1

4.2

Full Rack Extender Installation

4-1

Page 4
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Sigma SQC-122c manual Table of Contents Chapter Quick Start, Chapter Operation, Chapter Menus, Chapter Options