Chapter 1

Quick Start

1.4System Connections

S e n s o r

I n - V a c

C a b l e

F e e d t h r o u g h

6 " B N C C a b l e

Oscillator

S o u r c e Shutter

B N C

Evaporation Supply

C a b l e s

 

 

O u t p u t C o n t r o l I n p u t

 

G r o u n d W i r e

This section identifies typical system components and their connection:

System Components

Sensor

In-Vac Cable

Feedthrough

6” BNC Cable

Oscillator

Sensor Input BNC Cable

Control Output BNC Cable

Ground Wire

Holds the quartz crystal used to measure rate and thickness. Crystals must be replaced occasionally.

A coaxial cable that connects the sensor to the feedthrough.

Provides isolation between vacuum and atmosphere for electrical and cooling lines.

Provides a flexible connection from the feedthrough to the oscillator. Keep this cable as short as possible.

Contains the electronics to operate the quartz crystal. Total cable length to the crystal should be under 40”.

Connects the oscillator to the SQC-122c input. Lengths up to 100’ are acceptable.

Connects the SQC-122c output to the evaporation source’s control voltage input. Keep the length below 10’.

A wire, typically braided, that connects the vacuum system to the SQC-122c ground terminal.

1-4

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Sigma SQC-122c manual Chapter Quick Start System Connections