Chapter 3 | Menus |
The material to be deposited is the most significant film parameter. However, a film definition also includes the setup parameters shown below:
Exit to
Main
Prev
Menu
Edit
Film
Conds.
Deposit
Controls
THICKNESS(kA) |
| RATE(A/s) | POWER( %) | ||
0.000 | 0.0 | 0.0 |
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My Process 1 Editing: Aluminum |
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Parameter |
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P Term | 50 |
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I Term | 0.7 |
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D Term | 0.0 |
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Sensor 1 |
| On | On/Off |
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Sensor 2 |
| On | On/Off |
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Film Tooling | 100 |
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Output |
| Out1 | Out1/Out2 |
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1 |
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Max Power | 76.0 |
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Slew Rate | 10.0 |
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Crystal Quality |
| Disabled |
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Film Edit Menu
Exit to Main
Prev
Menu
Edit
Returns to the Main Menu.
Returns to the Film Select Menu.
Selects the highlighted parameter for edit. SoftKey functions change to:
Next: Store parameter and move to next for editing.
Cancel: Stop editing and undo changes to selected parameter.
Enter: Stop editing and save values for selected parameter.
Control Knob: Turn to adjust value. Push to store value and move to next parameter.
Film Conds. Displays pre/post conditioning settings (See 2.6).
Deposit Controls Displays deposition control settings (See 2.2).
Control Knob Scrolls through the list of film parameters.
