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Chapter 1

Quick Start

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1-9

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Sigma SQC-122c manual This page left blank for your notes

Contents

SQC-122c Thin Film Deposition Controller User’s Guide Safety Information Safety Symbols Return Policy Warranty InformationLimitation of Warranty Chapter Menus Table of Contents Chapter Quick StartChapter Operation Chapter Options Appendix Chapter Quick Start Introduction Thin Film Process Overview Chapter Quick Start Front Panel Power Input Fuse Chapter Quick Start Rear Panel Chapter Quick Start System Connections Chapter Quick Start Installation Quick Setup Chapter Quick Start Process SetupPower Select Exit to Main Edit Mode LayerChapter Quick Start Chapter Quick Start Depositing a Film This page left blank for your notes Defining a Film Chapter Operation IntroductionDefinitions POWER% POWER% Deposition Controls Menu Chapter Operation Defining a Process Layer Edit Menu Chapter Operation Chapter Operation Sensor Setup Tooling U n d e r 1 0 0 % Chapter Operation Chapter Operation Source Setup Chapter Operation Running a Process Chapter Operation Next Menu Zero THICKNESSkA RATEA/s 824 55.3 Chapter Operation Loop Tuning Chapter Operation Chapter Operation Troubleshooting No Readings, or Erratic Readings from Sensors Incorrect Rate or Thickness Measurement Poor Rate Stability This page left blank for your notes Chapter Menus Introduction Default, power-up Main Screen display is shown below Chapter Menus Main Menu Menu Quick SetupNext Film Chapter Menus Next Menu Screens Prev Layer Chapter Menus Quick Setup MenuExit to Main Edit Next Layer Chapter Menus Chapter Menus Process Menus Main Screen Prev Menu Select Edit Delete Control Knob Main Screen Prev Menu Edit Cut Paste Insert Layer Control Knob POWER% Exit to Main Prev Menu Edit Control Knob Chapter Menus Chapter Menus Film Menus Main Screen Prev Menu Edit Delete Control Knob Exit to Main Prev Menu Edit Exit to Main Prev Menu Edit THICKNESSkA RATEA/s Deposition Controls Menu Chapter Menus Chapter Menus Chapter Menus Chapter Menus System Parameters Menu Chapter Menus Chapter Menus Chapter Menus I/O Setup Mapping Menu Relays Explanation closes when Inputs Explanation high input causes This page left blank for your notes Option Card Full Rack Extender InstallationChapter Options Introduction Appendix Material Parameters Measurement Appendix SpecificationsGeneral Specifications Source Display Appendix O Connections Connector Wiring Relay PinsInput Pins Appendix Appendix Handheld Remote Controller Declares that the product Complies with the Essential Health and Safety RequirementsAppendix EC Declaration of Conformity Uses the following standards