Chapter 3

Menus

Each layer consists of a film (i.e. a material), plus the deposition rate and thickness that are desired for this layer. The Layer Edit Menu provides access to these layer parameters:

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Edit

THICKNESS(kA)

 

RATE(A/s)

POWER(% )

0.000

0.0

0.0

 

My Process 2 -> Layer 2 -> AluminumOxide

 

 

 

 

 

 

 

Parameter

 

Value

Units

 

 

 

 

 

 

 

9.9

A/s

 

Init Rate

 

 

 

 

 

 

Fnl Thk

9.000

kA

 

Time Setpoint

0:00:00

h:mm:ss

 

Thickness Limit

0.000

A

 

Start Mode

 

Manual

Auto/Man .

 

Ramp 1

 

Enabled

En/Dis

 

Start Thkness

4.500

kA

 

Ramp Time

0:10:00

h:mm:ss

 

New Rate

99.0

A/s

 

Ramp 2

 

Disabled

En/Dis

 

 

 

 

 

 

 

 

 

 

 

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Edit

Control Knob

Edit Layer Menu

Returns to the Main Menu.

Returns to the Layer Select Menu.

Selects the highlighted parameter for edit. SoftKey functions change to:

Next: Store parameter and move to next for editing.

Cancel: Stop editing and undo changes to selected parameter.

Enter: Stop editing and save values for selected parameter.

Control Knob: Turn to adjust value. Push to store value and move to next parameter.

Scrolls through the list of layer parameters.

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Sigma SQC-122c manual Exit to Main Prev Menu Edit Control Knob, Power%