Sigma SQC-122c manual Chapter Quick Start Depositing a Film

Chapter 1 Quick Start

1.7Depositing a Film

If you have followed this Quick Start chapter, you are ready to deposit a film.

Note: You can simulate the steps below, without actually depositing a film, by going to the System Parameters Menu and selecting Simulate Mode ON. Simulate mode is useful for testing processes before applying power to the evaporation supply. See Section 3.6 for System Parameters Menu information.

Verify Output	From the Main Menu, press the Next Menu SoftKey. Then,
Operation	press Auto/Manual to display Manual/Auto. Slowly turn the
	control knob to increase the control voltage to your evaporation
	supply. Verify that the Power(%) reading in the display upper
	right-hand corner approximates the actual output of your
	evaporation supply. If not, check your hookup (1.5), and refer
	to Scale Voltage (3.6).
Verify Sensor	Press Next Menu until the Switch Displays option is shown.
Operation	Press Switch Displays to display Sensor 1 and Sensor 2 in
	the lower status section of the screen. At least one sensor
	should be ON and display a % life of over 50%. If not, check
	your sensor connections (1.5), and refer to Min/Max Frequency
	(3.6).
Enter	Press the Next Menu key twice to display the output screen.
Auto Mode	Press Manual/Auto until Auto/Manual is displayed.
Show	Press Next Menu once more. Press the Next Graph SoftKey
Power Graph	until the graph shows Power (% vs. Time).
Start	Press the Start key to start the deposition process. Graphing
Process	of the output power should start.
	Caution: Observe the output power versus your evaporation
	supply’s actual output. If there is a problem, press the Stop
	SoftKey immediately.

If the rate and thickness readings do not match your expectations, refer to Appendix A for information on Density and Z-Factor, and Section 2.4 for Tooling.

Please take time to review the remainder of this manual for detailed operational, programming, and safety information.

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