R-4104A
ADJUSTMENT | 5. Centering the Tube Attaching and Stage Attaching Parts |
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5.Centering the Tube Attaching and Stage Attaching Parts
To perform the centering, use the three to ois, as foilows:
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| Fig. 2 (P. 3) on the tube receptacle 0·Set |
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| the part @ onto the stage attaching mrface |
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| of the substage. (Fig. 45) |
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| 2) | Push the part @) against the part @ from |
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| above. If the former enters the latter, it |
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| proves correct centering. |
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| 3) If not, make adjustment, using the two |
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| upper screws of ~ •4 behind the arm, |
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| so that the part@ enters the part @. |
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| Thereafter, make parallelism adjustment, | Fig. 45 | ||
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| using the lower two screws. |
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( | 4) | Smooth insertion of the part @ into the part @ ensures the parailelism within the | |||
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| range as shown in Fig. 44(b ). |
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| between the objective attaching and stage attaching surfaces. |
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| 1) Set tool 125145 onto the objective attach· |
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| ( | ing | surface to be checked. Place 125143 on |
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| the | stage attaching surface. |
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| 2) | Raise the substage to see that the clearance |
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| of 125145 is smaller than 1/1 OOmm (in X |
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| and | Y directions). |
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| 3) If it is found over l/IOOmm, make the |
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| sarne adjustment as mentioned above in 4.3) |
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| (P. 39), until it comes within the specified |
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range.
Fig. 46
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