Schneider Electric PM820 Appendix D-Advanced Power Quality Evaluations, Power Quality Standards

63230-500-225A2	PowerLogicTM Series 800 Power Meter
3/2011	Appendix D—Advanced Power Quality Evaluations

Appendix D—Advanced Power Quality Evaluations

The information in this appendix applies to the following models:

•PM850—EN50160 (evaluation only)

•PM870—EN50160, ITI (CBEMA), and SEMI-F47

Power Quality Standards

The Advanced Power Quality feature includes power quality (PQ) evaluations according to the European standard EN50160 and the SEMI-F47/ITI (CBEMA) specifications. The PM870 registers data under both standards. The PM850 can report data under the EN50160 standard only. For instructions on how to enable these evaluation features, see “PQ Advanced Evaluation Setup” on page 22.

SEMI-F47/ITI (CBEMA) Specification

The SEMI-F47-200 Specification for Semiconductor Processing Equipment Voltage Sag Immunity was approved by the Global Facilities Committee and is the direct responsibility of the North American Facilities Committee. This standard is very similar to the Information Technical Industry (ITI) Council standard.

Semiconductor factories require high levels of power quality due to the sensitivity of equipment and process controls. Semiconductor processing equipment is especially vulnerable to voltage sags.

The SEMI-F47 standard addresses specifications for semiconductor processing equipment voltage sag immunity. It does not include over-voltage conditions, voltage sag durations less than 0.05 seconds (50 milliseconds), or voltage sag duration greater than 1.0 seconds.

If necessary, the ITI CBEMA-curve can be used to specify additional requirements.

Refer to the Schneider Electric POWERLOGIC Web Pages Instruction Bulletin (document

#63230-304-207) for more information on using the web pages on the ECC to view SEMI-47 and ITI(CBEMA) data.

Table D–1: Categorized disturbance levels (% of nominal)

Sag levels	Swell levels
80% — 90%	110% — 120%
70% — 80%	120% — 140%
40% — 70%	140% — 200%
0% — 40%	200% — 500%

Table D–2: Duration categories

Duration

< 20 msec

20 msec — 500 msec

500 msec — 10 sec

>10 sec

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