Maintenance 4. Maintenance Parts List
4.2 Parts by Environment Model
4.2.1 S: Standard-model
Part Name |
| Code | Note |
Ball Screw Spline | 150 mm | R13B010220 |
|
Arm Cover |
| R13B030421 | White |
|
|
|
|
Arm Bottom Cover |
| R13B030423 |
|
4.2.2 C: Cleanroom-model
Part Name |
| Code | Note |
Ball Screw Spline | 120 mm | R13B010221 |
|
Arm Cover |
| R13B030422 | Plating |
|
|
|
|
Arm Bottom Cover |
| R13B030424 |
|
Bellows |
| R13B030704 |
|
Gasket Unit |
| R13B031234 |
|
|
|
|
|
82 | G3 Rev.1 |
