Maintenance 4. Maintenance Parts List
82 G3 Rev.1
4.2 Parts by Environment Model

4.2.1 S: Standard-model

Part Name Code Note
Ball Screw Spline 150 mm R13B010220
Arm Cover R13B030421 White
Arm Bottom Cover R13B030423

4.2.2 C: Cleanroom-model

Part Name Code Note
Ball Screw Spline 120 mm R13B010221
Arm Cover R13B030422 Plating
Arm Bottom Cover R13B030424
Bellows R13B030704
Gasket Unit R13B031234