9600 Compressor Installation, Operation, and Maintenance
General
HELIX TECHNOLOGY CORPORATION
The information in Table
Table 1-4: General Compressor Operating Specifications
Specification |
| Values |
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Part Numbers |
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Input Power Cable |
| 600 VAC |
(Customer Supplied) |
| 10 Gauge, 3 conductor wire with ground |
|
| Must conform to local electrical codes |
|
|
|
Nominal Helium Pressure |
| Refer to Table |
|
|
|
Ambient Operating |
| 50 - 100º F (10 - 38º C) |
Temperature Range |
|
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Interface |
| Cryopump Power Receptacles: mates with the |
|
| |
|
| single pump use. |
|
| Mates with remote junction box power cable for multiple |
|
| cryopump use. |
Gas Supply Connector |
| 1/2 in. Aeroquip |
Gas Return Connector |
| 1/2 in. Aeroquip |
Remote Control Receptacle |
| 24VAC, 2.7A inductive mates with P5 connector P/N |
|
| MS3106A* |
|
|
|
Adsorber Service Schedule |
| 3 Years |
|
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|
| * Supplied by | |
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NOTE: The 9600 Compressor is designed for continuous operation and should remain ON when the cryopumps are in a regeneration cycle.
P/N 8040540 |