Olicom 9600 manual Compressor

Page 10

9600 Compressor Installation, Operation, and Maintenance

CTI-CRYOGENICS

HELIX TECHNOLOGY CORPORATION

Figure 1-1: 9600 Compressor

P/N 8040540

1-3

Image 10

Contents Compressor Installation, Operation, Maintenance Instructions 8040540 Rev 12/2004Helix Page Table of Contents Maintenance InstallationOperation Figures Tables General Compressor Configurations9600 Compressor Description BenefitsSystem Documentation CTI-CRYOGENICS Helium Refrigeration System9600 Compressor Specifications DimensionsElectrical Input Specifications WeightCompressor Weight ElectricalCooling Water Specifications Cooling WaterGeneral Compressor Operating Specifications GeneralComponent Description 9600 Compressor Rear View Component LocationsSystem Circuit Breaker Power on IndicatorPower Inlet Control Circuit BreakerCryopump Electrical Outlet Return Gas CouplingCooling Water OUT Cryopump Electrical Outlet Pin AssignmentsCompressor Remote Connector Pin Assignments Cryopump Power Phase SwitchCompressor Remote Connector Multiple On-Board Cryopump Connections9600 Compressor Connected to Multiple On-Board Cryopumps Multiple Cryo-Torr Cryopump Connections 9600 Compressor Connected to Multiple Cryo-Torr CryopumpsCTI-CRYOGENICS Shipping Carton Inspection Unpacking and InspectionIntroduction Removal from Shipping CartonCompressor Shipping Carton ContentsCompressor Inspection Helium Static Pressure VerificationInstallation END Hard Water Lines Supply and Return Water Line ConnectionsFlexible Water Lines Power Cable Preparation Electrical Connections9600 Compressor Circuit Breaker Terminals Cover Removed Phase Check Proceed with Cryopump Power Phase Switch SettingCryopump Power Phase Switch Setting Connecting/Disconnecting Helium Flex LinesConnecting Disconnecting Single On-Board Cryopump Connections Single On-Board Cryopump ConnectionsSingle Cryo-Torr Cryopump Installation Single Cryo-Torr Cryopump ConnectionsHelium Line Connections Power Cable Connections Multiple Cryo-Torr Cryopump Connections CTI-CRYOGENICS Recommended Multiple Cryo-Torr Cryopump Installation Alternative Multiple Cryo-Torr Cryopump Installation Static Helium System Pressure Verification Adjusting System Helium PressureOperation 9600 Compressor Helium Static ChargeCompressor Operation Replacement of Helium Circuit Components CTI-CRYOGENICS Scheduled Maintenance MaintenanceSuggested Maintenance Equipment Adsorber Replacement Disconnecting Self Sealing CouplingsDate Reducing Helium Pressure 9600 Compressor Helium Pressure Control ComponentsIncreasing Helium Pressure Adding HeliumCTI-CRYOGENICS Mail Appendix a Customer Support InformationProduct Information Page Appendix B Flow Diagram Figure B-19600 Compressor Flow DiagramAppendix B Flow Diagram Troubleshooting the Compressor Appendix C Troubleshooting ProceduresTechnical Inquiries Table C-1 Compressor Troubleshooting Procedures Compressor RemoteAppendix a to contact CTI-CRYOGENICS Appendix D Schematic Figure D-19600 Motor Drive Compressor Schematic