Olicom 9600 manual Cti-Cryogenics

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Installation

CTI-CRYOGENICS

HELIX TECHNOLOGY CORPORATION

1.Connect the Supply and Return lines to the 9600 Compressor as described in Connecting/Disconnecting Helium Flex Lines within this section.

2.Connect the Gas Return Line to the customer supplied helium manifold and then to the Gas Return connector on the Cryo-Torr Cryopump.

3.Connect the Gas Supply Line to the customer supplied helium manifold and then to the Gas Supply connector on the Cryo-Torr Cryopump.

Power Cable Connections

1.Connect the Cryo-Torr power cable between the CRYOPUMP ELECTRICAL OUTLET on the rear panel of the Compressor and the CRYOPUMP ELECTRICAL INPUT on the Cryo-Torr Interface as shown in Figures 3-8 or 3-9.

2.Connect the Cryo-Torr Power Cables between the CRYOPUMP 1, 2, or 3 connectors on the Cryo-Torr Interface and the respective Cryo-Torr Cryopumps as shown in Figures 3-8 or 3-9.

3.Connect the User Remote cable to the Cryo-Torr Interface as shown in Figures 3-8 or 3-9.

4.Connect the Remote cable between the Cryo-Torr Interface and the Compressor as shown in Figures 3-8 or 3-9.

NOTE: Your installation may vary based upon the Cryo-Torr Cryopump models used. Refer to Appendix A to consult your local CTI-CRYOGENICS Customer Support Center for information on specific compressor/cryopump applications.

3-14

P/N 8040540

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Contents 8040540 Rev 12/2004 Compressor Installation, Operation, Maintenance InstructionsHelix Page Table of Contents Maintenance InstallationOperation Figures Tables 9600 Compressor Description Compressor ConfigurationsGeneral BenefitsCTI-CRYOGENICS Helium Refrigeration System System Documentation9600 Compressor Dimensions SpecificationsCompressor Weight WeightElectrical Input Specifications ElectricalCooling Water Cooling Water SpecificationsGeneral General Compressor Operating Specifications9600 Compressor Rear View Component Locations Component DescriptionPower Inlet Power on IndicatorSystem Circuit Breaker Control Circuit BreakerCooling Water OUT Return Gas CouplingCryopump Electrical Outlet Cryopump Electrical Outlet Pin AssignmentsCompressor Remote Connector Cryopump Power Phase SwitchCompressor Remote Connector Pin Assignments Multiple On-Board Cryopump Connections9600 Compressor Connected to Multiple On-Board Cryopumps 9600 Compressor Connected to Multiple Cryo-Torr Cryopumps Multiple Cryo-Torr Cryopump ConnectionsCTI-CRYOGENICS Introduction Unpacking and InspectionShipping Carton Inspection Removal from Shipping CartonCompressor Inspection Shipping Carton ContentsCompressor Helium Static Pressure VerificationInstallation END Hard Water Lines Supply and Return Water Line ConnectionsFlexible Water Lines Electrical Connections Power Cable Preparation9600 Compressor Circuit Breaker Terminals Cover Removed Proceed with Cryopump Power Phase Switch Setting Phase CheckCryopump Power Phase Switch Setting Connecting/Disconnecting Helium Flex LinesConnecting Disconnecting Single On-Board Cryopump Connections Single On-Board Cryopump ConnectionsSingle Cryo-Torr Cryopump Connections Single Cryo-Torr Cryopump InstallationHelium Line Connections Power Cable Connections Multiple Cryo-Torr Cryopump Connections CTI-CRYOGENICS Recommended Multiple Cryo-Torr Cryopump Installation Alternative Multiple Cryo-Torr Cryopump Installation Operation Adjusting System Helium PressureStatic Helium System Pressure Verification 9600 Compressor Helium Static ChargeCompressor Operation Replacement of Helium Circuit Components CTI-CRYOGENICS Scheduled Maintenance MaintenanceSuggested Maintenance Equipment Disconnecting Self Sealing Couplings Adsorber ReplacementDate 9600 Compressor Helium Pressure Control Components Reducing Helium PressureAdding Helium Increasing Helium PressureCTI-CRYOGENICS Mail Appendix a Customer Support InformationProduct Information Page Figure B-19600 Compressor Flow Diagram Appendix B Flow DiagramAppendix B Flow Diagram Troubleshooting the Compressor Appendix C Troubleshooting ProceduresTechnical Inquiries Compressor Remote Table C-1 Compressor Troubleshooting ProceduresAppendix a to contact CTI-CRYOGENICS Appendix D Schematic Figure D-19600 Motor Drive Compressor Schematic