Olicom 9600 manual System Documentation, CTI-CRYOGENICS Helium Refrigeration System

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9600 Compressor Description

CTI-CRYOGENICS

HELIX TECHNOLOGY CORPORATION

System Documentation

The manuals for a system cover two basic components: the cryopump and the Compressor. A manual is shipped with each system component to provide information for installation and operation of that component.

A loose-leaf binder with index tab separators is also provided so you can compile a complete set of tabulated manuals.

CTI-CRYOGENICS Helium Refrigeration System

The operation of CTI-CRYOGENICS’ cryopumps is based upon a closed loop helium expansion cycle. The system is made up of two major components: the cryopump, which contains the cold head, and the helium Compressor which compresses the helium gas.

Refrigeration is produced in the cryopump cold head through periodic expansion of high pressure helium in a regenerative process. The high pressure helium is provided by the Compressor. Low pressure helium returning from the cold head is compressed into the necessary high pressure to be returned to the cold head. The energy required to compress the helium is rejected as heat through the cooling water.

High pressure room temperature helium is transferred to the cold head through the supply lines. After expansion, low pressure helium is returned to the Compressor (at or near room temperature) to repeat the cycle in a closed loop fashion. Large separation distances can be accommodated between the Compressor and the cryopump.

In the Compressor, helium is compressed using a highly reliable oil lubricated commercial Compressor. Helium purification takes place via several stages of oil removal. The final stage of purification is performed with a replaceable adsorber cartridge. In order to maintain peak efficiency, the adsorber must be replaced every three years. The 9600 Compressor is shown in Figure 1-1.

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P/N 8040540

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Contents 8040540 Rev 12/2004 Compressor Installation, Operation, Maintenance InstructionsHelix Page Table of Contents Installation MaintenanceOperation Figures Tables 9600 Compressor Description Compressor ConfigurationsGeneral BenefitsCTI-CRYOGENICS Helium Refrigeration System System Documentation9600 Compressor Dimensions SpecificationsCompressor Weight WeightElectrical Input Specifications ElectricalCooling Water Cooling Water SpecificationsGeneral General Compressor Operating Specifications9600 Compressor Rear View Component Locations Component DescriptionPower Inlet Power on IndicatorSystem Circuit Breaker Control Circuit BreakerCooling Water OUT Return Gas CouplingCryopump Electrical Outlet Cryopump Electrical Outlet Pin AssignmentsCompressor Remote Connector Cryopump Power Phase SwitchCompressor Remote Connector Pin Assignments Multiple On-Board Cryopump Connections9600 Compressor Connected to Multiple On-Board Cryopumps 9600 Compressor Connected to Multiple Cryo-Torr Cryopumps Multiple Cryo-Torr Cryopump ConnectionsCTI-CRYOGENICS Introduction Unpacking and InspectionShipping Carton Inspection Removal from Shipping CartonCompressor Inspection Shipping Carton ContentsCompressor Helium Static Pressure VerificationInstallation END Supply and Return Water Line Connections Hard Water LinesFlexible Water Lines Electrical Connections Power Cable Preparation9600 Compressor Circuit Breaker Terminals Cover Removed Proceed with Cryopump Power Phase Switch Setting Phase CheckConnecting/Disconnecting Helium Flex Lines Cryopump Power Phase Switch SettingConnecting Disconnecting Single On-Board Cryopump Connections Single On-Board Cryopump ConnectionsSingle Cryo-Torr Cryopump Connections Single Cryo-Torr Cryopump InstallationHelium Line Connections Power Cable Connections Multiple Cryo-Torr Cryopump Connections CTI-CRYOGENICS Recommended Multiple Cryo-Torr Cryopump Installation Alternative Multiple Cryo-Torr Cryopump Installation Operation Adjusting System Helium PressureStatic Helium System Pressure Verification 9600 Compressor Helium Static ChargeCompressor Operation Replacement of Helium Circuit Components CTI-CRYOGENICS Maintenance Scheduled MaintenanceSuggested Maintenance Equipment Disconnecting Self Sealing Couplings Adsorber ReplacementDate 9600 Compressor Helium Pressure Control Components Reducing Helium PressureAdding Helium Increasing Helium PressureCTI-CRYOGENICS Appendix a Customer Support Information MailProduct Information Page Figure B-19600 Compressor Flow Diagram Appendix B Flow DiagramAppendix B Flow Diagram Appendix C Troubleshooting Procedures Troubleshooting the CompressorTechnical Inquiries Compressor Remote Table C-1 Compressor Troubleshooting ProceduresAppendix a to contact CTI-CRYOGENICS Appendix D Schematic Figure D-19600 Motor Drive Compressor Schematic