Olicom 9600 manual Connecting/Disconnecting Helium Flex Lines, Cryopump Power Phase Switch Setting

9600 Compressor Installation, Operation, and Maintenance

CTI-CRYOGENICS

HELIX TECHNOLOGY CORPORATION

Cryopump Power Phase Switch Setting

NOTE: On-Board Cryopumps can operate on two or three-phase power. Cryo-Torr Cryopumps only operate on two-phase power.

1.Inspect the On-Board Cryopump(s) being installed for the presence of a THREE-PHASE label by the RETURN helium connector.

2.If a three-phase label is present, set the cryopump power phase switch, shown in Figure 3-2, to the 3PH position.

3.If a three-phase label is not present, or Cryo-Torr Cryopumps are being installed, set the cryopump power phase switch, shown in Figure 3-2, to the 2PH position.

NOTE: All Cryopumps being connected to the 9600 Compressor must operate at the same phase.

Connecting/Disconnecting Helium Flex Lines

CAUTION

Make sure the helium flex lines are connected and disconnected from the 9600 Compressor using the following procedure and as shown in Figure 3-3. Failure to follow this procedure could damage connector O-ring seals or cause a helium circuit leak.

Connecting

1.Remove all dust plugs and caps from the Gas Supply and Return lines, and the Compressor and cryopump Supply and Return connectors. Check for the presence of a flat gasket in the male connector, and no gasket in the female connector.

2.Connect the Gas Return line to the GAS RETURN connector on the rear of the Compressor and then to the GAS RETURN connector on the cryopump. Using two wrenches as shown in Figure 3-3, tighten the connector.

3.Connect the Gas Supply line to the GAS SUPPLY connector on the rear of the Compressor and then to the GAS SUPPLY connector on the cryopump. Using two wrenches as shown in Figure 3-3, tighten the connector.

4.Attach the Supply and Return line identification labels to each end of the appropriate lines.

P/N 8040540 3-7